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Microsphere Coating System

A coating system and microsphere technology, applied in coating, metal material coating process, vacuum evaporation coating, etc., can solve the problems of uneven coating and inconvenient replacement of quartz discs, and achieve uniform coating and rotating path. Rich, easy to install and use effects

Active Publication Date: 2021-01-05
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The object of the present invention is to provide a kind of rebound disk device, to improve the problem of uneven coating in the traditional microsphere coating process
[0008] The purpose of the present invention is to provide a microsphere coating system to improve the problems of uneven coating and inconvenient replacement of quartz discs in the traditional microsphere coating process

Method used

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  • Microsphere Coating System
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Examples

Experimental program
Comparison scheme
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Embodiment

[0046] see figure 1 - figure 2 , the present embodiment provides a rebound disc device, which includes:

[0047] Rotary disk 100,

[0048] An autorotation disk 200 , the autorotation disk 200 is installed on the revolution disk 100 , the rotation axis of the rotation disk 200 is set eccentrically with the central axis of the revolution disk 100 , and the rotation disk 200 is used for installing the quartz disk 500 .

[0049] In the rebounding disk device provided in this embodiment, the revolving disk 100 is provided with an eccentric autorotating disk 200. During use, the quartz disk 500 is placed on the rotating disk 200, and the revolving disk 100 drives the rotating disk 200 to rotate during the rotation process. When the turntable 200 rotates with the revolving disk 100, it rotates by itself and drives the quartz disk 500 to rotate. With such a structural design, the rotation paths of the microspheres in the quartz disk 500 are more abundant and more random, making the...

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Abstract

The invention provides a bounce tray device and a microsphere coating system. The bounce tray device comprises a revolution tray and a rotation tray, wherein the rotation tray is arranged on the revolution tray; the rotation axis of the rotation tray is eccentric to the middle axis of the revolution tray; the rotation tray is used for installing a quartz tray. The bounce tray has the advantage that the rotation routes are diversified in the use process, so that the rotation of microspheres is more reasonable in the coating process, and the uniformity of microsphere coating is improved.

Description

technical field [0001] The invention relates to the field of laser inertial confinement fusion target making equipment, in particular to a rebounding disk device and a microsphere coating system. Background technique [0002] In the laser inertial confinement fusion (ICF: inertial confinement fusion) target making process, microspheres are often used as target pellets for the determination of various physical parameters, such as ablation rate, RT instability growth, radiation opacity and compression ratio determination etc. Therefore, the preparation of various microspheres plays an important role in the field of ICF and has attracted much attention. [0003] The preparation of microspheres often uses the physical vapor deposition coating method, which needs to be carried out in a vacuum chamber. Among them, the rebound disc is the core component of the microsphere coating. Taking magnetron sputtering as an example, the target gun (target installation) is fixed on the top...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/50
CPCC23C14/223C23C14/505
Inventor 罗炳池李文琦罗江山李恺陈龙张吉强何玉丹金雷李波吴卫东
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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