Electronic grade hydrogen fluoride preparation device
A process device, hydrogen fluoride technology, applied in the directions of hydrogen fluoride, fluorine/hydrogen fluoride, etc., can solve the problems of increasing the difficulty and cost of processing, non-compliance with technical specifications, highly toxic fluorine gas, etc., and achieves simple structure, low price, and liquid film. The effect of a large mass transfer coefficient
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[0040] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0041] Such as figure 1 , figure 2 , image 3 , Figure 4 , Figure 5 As shown, a process device for preparing electronic-grade hydrogen fluoride is characterized in that it includes a transpiration cycle reactor I, a circulating fluidized bed distillation tower II, and a washing, absorbing, and condensing tower assembly III.
[0042] The transpiration circulation reactor I includes an oxidation reaction kettle 1, a gas-liquid separator 2, a circulation storage tank 3, a sedimentation tank 4, a downcomer pipe 5, a boiling pipe 6, a return pipe 7, and a liquid collection tank 8.
[0043] The gas-liquid separator 2 includes a separation tank 9 and a liquid baffle 10 . A sedimentation tank 4 is designed at the bottom of the circulating storage tank 3 for collecting precipitated complex particles. The liquid collection tank 8 is communicated...
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