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A kind of preparation method of nanoporous silicon biconcave lens

A double-concave lens and nanoporous technology, which is applied in the field of semiconductor technology and optical engineering, can solve the problems of difficulty in realizing low-light-mechanical-electrical system integration, poor controllability, and complex process.

Active Publication Date: 2020-08-04
HUNAN UNIV OF ARTS & SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method is complicated in process, not strong in controllability, and difficult to realize micro-optical-mechanical-electrical system integration

Method used

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  • A kind of preparation method of nanoporous silicon biconcave lens

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Experimental program
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Effect test

Embodiment 1

[0018] The preparation method of this nanoporous silicon biconcave lens of the present invention specifically comprises the following steps:

[0019] 1. Select the type of silicon wafer as P 100 , a double-sided polished silicon wafer with a resistivity of 0.01Ω.cm and a thickness of 500 μm, two platinum wafers (thickness 200 μm) balls (radius 2 cm) crown bottom surface length = silicon wafer diameter as electrodes; silicon wafers and The spherical crown-shaped thin platinum sheet 3 is fully immersed in the electrolytic etching solution for electrochemical corrosion. The planes at the bottom of the silicon wafer and the two spherical crown-shaped thin platinum sheets 3 are parallel and the central axes of the three coincide. The electrolytic etching solution is based on the hydrogen fluorine Acid: Anhydrous ethanol and deionized water are prepared at a volume ratio of 1:1:2.

[0020] 2. Connect the circuit: put the corrosion solution in the corrosion tank 1, fix the silicon c...

Embodiment 2

[0031] The preparation method of this nanoporous silicon biconcave lens of the present invention specifically comprises the following steps:

[0032] 1. Select the type of silicon wafer as P 100 , a double-sided polished circular silicon wafer with a resistivity of 0.01Ω.cm and a thickness of 500 μm, two platinum wafers (thickness 200 μm) balls (radius 2 cm) crown bottom surface length L = silicon wafer diameter as electrodes; silicon wafers and the spherical crown-shaped thin platinum sheet 3 are all immersed in the electrolytic etching solution for electrochemical corrosion. The planes where the silicon wafer and the bottoms of the two spherical crown-shaped platinum sheets are located are parallel and the central axes of the three coincide. The electrolytic etching solution is based on hydrofluoric acid : Prepared with absolute ethanol and deionized water at a volume ratio of 1:1:2.

[0033]2. Connect the circuit: put the corrosion solution in the corrosion tank 1, fix the...

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Abstract

The invention discloses a method for preparing a nano porous silicon biconcave lens. According to the method, a platinum sheet conventionally serving as an electrode is made into a hollow sphere, andtwo symmetric spherical crowns cut out from the hollow sphere are made into electrodes; a silicon wafer is placed between the two spherical crowns, the two convex faces of the two spherical crown electrodes face the silicon wafer, and corrosive liquid is separated into two independent parts through the silicon wafer; a constant-flow source is firstly adopted for carrying out electropolishing on the silicon wafer, so that the same concave spherical surfaces are formed on the front face and the rear face of the silicon wafer; and the two symmetric spherical crown electrodes are replaced with parallel plate type electrodes, electrochemical corrosion is carried out on the two faces of the silicon wafer, and the porous silicon biconcave lens is formed. By means of the method, the nano porous silicon biconcave lens can be obtained and can be widely applied to a micro optical electromechanical system, and a great contribution is made to the field of the micro optical electromechanical system.

Description

technical field [0001] The invention relates to the fields of semiconductor technology and optical engineering, in particular to a method for preparing a nanoporous silicon biconcave lens. Background technique [0002] In 1956, Uhlir discovered the existence of porous silicon when electrochemically polishing silicon wafers in HF solution; in 1990, Canham discovered that porous silicon emits visible light at room temperature. This discovery opened up a new era for the research of porous silicon, namely Luminescence of porous silicon at room temperature is in the research stage; the luminescence of porous silicon at room temperature shows the broad application prospects of silicon in optoelectronics, optical devices and display technology. Especially in 1996, Hirschman's first realization of silicon-based optoelectronic integrated prototype device was a milestone in the application research of porous silicon. [0003] The porous silicon membrane is a sponge-like porous materi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B3/00C25F3/30
CPCC25F3/30G02B3/00
Inventor 龙永福
Owner HUNAN UNIV OF ARTS & SCI