A method for prepare a silver-doped copper-zinc-tin-sulfur film
A copper-zinc-tin-sulfur and silver-doped technology, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of silver-doped copper-zinc-tin-sulfur film compactness and low silver doping efficiency, and achieves The effect of improving carrier mobility, uniform distribution, and improving Ag doping efficiency
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Embodiment 1
[0053] Step 1: Soda-lime glass coated with molybdenum (Mo) was selected as the substrate, and the substrate was ultrasonically cleaned for 15 minutes with acetone, absolute ethanol, and deionized water in sequence, and dried with nitrogen gas for later use. Put the cleaned substrate into the magnetron sputtering vacuum chamber, and evacuate the vacuum chamber to the background vacuum degree of 5×10 -4 Pa, and then introduce argon gas as the working gas, wherein the flow rate of argon gas is 20mL / min, and the working pressure is 0.5Pa; Pre-sputtering to remove impurities on the surface of the target, wherein the atomic ratio of silver to copper-silver alloy in the copper-silver alloy target is 0.1; then the formal sputtering coating is performed, and the number of sputtering cycles is 4. In each sputtering cycle, The sputtering sequence is Zn, Sn, Cu-Ag, among which the sputtering powers of zinc single substance target, tin simple substance target and copper silver alloy target...
Embodiment 2
[0058] The difference between embodiment 2 and embodiment 1 is that the atomic ratio of silver to copper-silver alloy in the copper-silver alloy target in embodiment 1 is 0.1, while the atomic ratio of silver to copper-silver alloy in the copper-silver alloy target in embodiment 2 is 0.5.
Embodiment 3
[0060] The difference between Example 3 and Example 1 is that the vulcanization temperature in Example 1 is 500° C., and the vulcanization temperature in Example 3 is 540° C.
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