Manufacturing method of self-sensing micro-clamps with grippers of fiber optic fabry-perot interferometer

Abstract

It is an object of the present invention to provide a manufacturing method of a micro-gripper which takes an optical fiber Fabry-Perot interferometer as a clamping jaw and which has a self-sensing function, wherein that micro clamp manufactured by the manufacture method can solve the problem that the clamping jaws of the micro clamp in the prior art can not simultaneously realize the clamping component and the clamping force self-sensing. The method comprises the following steps of: fusing silica capillary tube with reflective optical fiber and input / output optical fiber respectively to form optical fiber Fabry-Perot interferometer; forming a clamping portion of the jaw on the reflective optical fiber; forming an oxide layer on the upper and lower surfaces of the silicon wafer; photoetching a groove pattern on an upper oxide layer of a silicon wafer and a pattern of a monolithic flexible mechanism on a lower oxide layer of the silicon wafer by a photoresist, and etching a part of the silicon wafer that is not covered by the photoresist on an upper surface and a part of the silicon wafer that is not covered by the photoresist on a lower surface to form a groove and a monolithic flexible mechanism; installing the optical fiber Fabry-Perot interferometer with groove and single flexible mechanism respectively, and connecting the input / output optical fiber, the F-P demodulator, an actuator, the F-P demodulator and the controller correspondingly.

Description

technical field [0001] The invention relates to the field of micro-operation and micro-assembly, in particular to a method for manufacturing a micro-clamp with a gripper of an optical fiber Fabry-Perot interferometer and capable of self-sensing. Background technique [0002] With the rapid development of micro-electro-mechanical systems (Micro-Electro-Mechanical System, MEMS), coupled with the fact that traditional MEMS manufacturing processes cannot produce tiny parts with complex three-dimensional geometric structures and composed of different materials, micro-assembly and micro-operation technologies have emerged. pivotal role. Micro grippers are the end effectors of micro-assembly systems and micro-operating systems. They are in direct contact with the manipulated objects and play a decisive role in the completion of micro-assembly and micro-operation tasks. They are widely used in biomedicine, electronics manufacturing, and aerospace. and military fields. [0003] Com...

AI Technical Summary

Problems solved by technology

[0006] The object of the present invention is to provide a kind of manufacturing method of the micro-clamp that is the optical fiber Fabry-Perot interferometer and self-sensing, to solve the problem that the jaws of the micro-clamp made by the manufacturing method in the prior art cannot simultaneously Realize clamping parts and clamping force self-sensing problem

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