Method for improving atmosphere cleanness in polycrystalline silicon ingot furnace
A polycrystalline silicon ingot furnace and furnace atmosphere technology, which is applied to the high-efficiency ingot casting process, effectively improves the cleanliness of the atmosphere in the ingot furnace, and can solve the problem of affecting the efficiency of polycrystalline silicon slice yield, impurity can not be effectively discharged with the air flow, ingot casting Problems such as unreasonable process air flow, to achieve the effect of convenient implementation, non-volatile, and improved cleanliness
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[0014] A method for improving the cleanliness of the atmosphere in a polysilicon ingot furnace, including two improvements:
[0015] On the one hand, the organic reagent with low vapor pressure and high viscosity is adhered to the inner wall of the furnace. The kinematic viscosity of organic reagent: 40-100 mm2 / s at 40 °C; vapor pressure: below 1×10-2 Pa at 50 °C (for example, satisfying Lubricating oils with the above viscosity and vapor pressure conditions, mineral oils or synthetic oils are acceptable). The organic reagent is brushed on the inner wall of the furnace before the furnace is put into operation. Low vapor pressure organic reagents are not easy to volatilize in the high temperature environment in the furnace, and the viscosity is high, which can adhere to the particulate impurities in the furnace, reducing the particulate impurities in the initial stage of operation and the particulate impurities in the airflow during operation
[0016] On the other hand, during...
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