Low-cost N type double-side battery preparation method
A double-sided battery, low-cost technology, applied in the field of solar cells, can solve the problems of complex preparation methods, large amount of silver paste, large shading area, etc., to save mask steps, save silver paste costs, and high conversion efficiency Effect
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[0036] This embodiment relates to a method for preparing a low-cost N-type double-sided battery, including the following steps:
[0037] (1) Texturing: Select N-type monocrystalline silicon wafers as the base material, and use trough-type texturing equipment for alkali texturing, with a reflectivity of 10%;
[0038] (2) Diffusion of boron and phosphorus: use a tubular low-pressure diffusion furnace to diffuse boron and phosphorus on silicon wafers after texturing, and the resistance after diffusion is 80 / 183ohm respectively;
[0039] ⑶ Polishing and etching on the back, removing BSG / PSG;: Use chain etching equipment to polish and etch the back, and remove phosphosilicate glass and borosilicate glass at the same time, with a reflectivity of 30%;
[0040] ⑷ Deposit alumina on the front side: ALD method is used to deposit alumina on the front side, and the thickness of alumina is 5nm;
[0041](5) Deposit SiNx on the front and back: use tubular PECVD method to deposit anti-reflec...
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