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A method for integrating composite polysilicon resistors in integrated circuits

A polysilicon resistor and integrated circuit technology, applied in circuits, resistors, electrical components, etc., can solve the problems of failing to meet circuit accuracy requirements, increasing chip manufacturing costs, and resistor accuracy errors, saving manufacturing costs and reducing chip area. , Improve the effect of resistance accuracy

Inactive Publication Date: 2020-09-01
江苏清联光电技术研究院有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the resistance value of the square resistance of the polysilicon resistor that the chip foundry can provide is single, so that the length of the resistance bar required when designing a resistor with a large resistance value is longer, which will occupy a large chip area and greatly improve the chip. Manufacturing cost; when designing a resistor with a small resistance value, the length of the required resistance strip is too short, and the resistance accuracy error is extremely large, which cannot meet the accuracy requirements of the circuit

Method used

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  • A method for integrating composite polysilicon resistors in integrated circuits
  • A method for integrating composite polysilicon resistors in integrated circuits
  • A method for integrating composite polysilicon resistors in integrated circuits

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Embodiment Construction

[0037] It should be noted that, in the case of no conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0038] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner" and "outer" are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and Simplified descriptions, rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and thus should not be construed as limiting the invention. In addition, the terms "first", "second", etc. are used for descriptive purposes only, and should not be understood ...

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Abstract

The invention relates to a method for integrating a composite polyresistor in an integrated circuit. The method includes that ultrahigh-resistance ion injection is performed on a polysilicon layer growing above a device field oxidation layer to obtain an ultrahigh-resistance polyresistor, high-resistance ion injection is performed on the ultrahigh-resistance polyresistor again to obtain a high-resistance polyresistor, doping ions are diffused into the ultrahigh-resistance polyresistor through a furnace tube to obtain a low-resistance polyresistor, a source electrode and a drain electrode are formed through ion injection while ions are injected into a part of the ultrahigh-resistance polyresistor to form a medium-resistance polyresistor, and four polyresistors different in resistance valueare obtained, so that great convenience is brought to circuit design engineers for design, resistance accuracy of a low-resistance-value resistor is improved substantially, chip occupation area of theultrahigh-resistance resistor is reduced, and chip making cost is lowered.

Description

technical field [0001] The invention belongs to the technical field of semiconductor integrated circuits, in particular to a method for integrating composite polysilicon resistors in integrated circuits. Background technique [0002] Resistors are one of the most commonly used devices in electronics. Resistors can be used in circuits as voltage dividers, shunts, and load resistors. Resistors and capacitors can form filters and delay circuits; they are used as sampling resistors in power circuits or control circuits, and used as bias resistors in semiconductor tube circuits to determine operating points; resistors with special properties such as varistors, thermal Sensitive resistors can prevent surge voltage, suppress inrush current, and realize over-temperature protection. [0003] Compared with diffused resistors, polysilicon resistors have excellent temperature stability and are widely used in integrated circuits. The square resistance of general-purpose polysilicon res...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L23/64H01L21/822
CPCH01L21/822H01L23/647H01L28/20
Inventor 不公告发明人
Owner 江苏清联光电技术研究院有限公司
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