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Immersion head with protective glass

A technology for protecting glass and head base, applied in the field of imaging optics, can solve problems such as inability to achieve, and achieve the effect of increasing the resolution of the objective lens and reducing damage

Pending Publication Date: 2019-03-01
CHANNGCHUN CHANGGUANG ADVANCED OPTICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of this system is the inability to achieve corrosion protection of the objective lens in the application of special aggressive immersion solutions

Method used

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  • Immersion head with protective glass
  • Immersion head with protective glass

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Experimental program
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Effect test

Embodiment Construction

[0018] Such as figure 1 As shown, the immersion head with cover glass of the present invention comprises immersion head base 3 and cover glass 2; The last sheet glass 1 of objective lens is installed in lens barrel 5; The upper edge of immersion head base 3 is connected with mirror by four screws 4. The cylinder 5 is connected; the bottom of the immersion head base 3 has a through hole, and the protective glass 2 is bonded and sealed at the bottom of the through hole with an anti-corrosion glue; the gap between the bottom of the lens 1 and the protective glass 2 is used as a liquid chamber 6. A coaxial liquid injection hole 3.1 and a liquid discharge hole 3.2 are processed at the position of the immersion head base 3 corresponding to the liquid chamber 6; the non-corrosive solution can be injected into the liquid chamber 6 through the liquid injection hole 3.1, and the non-corrosive solution is simultaneously The liquid chamber 6 is drained through the drain hole 3.2.

[0019...

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Abstract

The invention relates to an immersion head with protective glass. The immersion head comprises an immersion head base and the protective glass. The upper edge of the immersion head base is fixedly connected with a lens barrel. The bottom end of the immersion head base is provided with a through hole. The protective glass is bonded at the bottom end of the through hole in the sealing mode. A gap between the bottom of a last objective lens and the protective glass serves as a liquid receiving cavity, and an injection hole is processed in the immersion head base at the position corresponding to the liquid receiving cavity. The immersion head can prevent an immersion solution from causing corrosion to the objective lens, and can effectively protect the objective lens while increasing the resolution of the objective lens.

Description

technical field [0001] The invention belongs to the technical field of imaging optics, and in particular relates to an immersion head with protective glass. Background technique [0002] Immersion imaging fills a liquid with a high refractive index between the last mirror of the objective lens and the object. Compared with the dry imaging system in which the intermediate medium is gas, the numerical aperture (NA) of the objective lens is improved, thereby improving the resolution of the objective lens. rate and depth of focus. [0003] Immersion imaging has a good inheritance to dry imaging systems, and can achieve higher resolution. It was successfully applied in the pursuit of extreme resolution applications such as lithography objectives and high-precision microscope objectives in the early days. The solution selected for immersion is mainly Mainly pure water and oil, non-corrosive to optical lenses. With the maturity of related technologies, the application fields of i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/70341G03F7/70716
Inventor 张继真张新管海军谢晓麟曲贺盟王超徐放王哈
Owner CHANNGCHUN CHANGGUANG ADVANCED OPTICS TECH CO LTD
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