Transparent conducting film based on zinc oxide
A technology of transparent conductive film and base layer, applied in the direction of oxide conductors, conductive layers on insulating carriers, circuits, etc., can solve problems such as low environmental stability, and achieve the effect of avoiding maintenance and operating costs
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[0065] use Figure 6 The two RF power delivery schemes presented in , produced prototypes of transparent conductive films under the deposition conditions described above.
[0066] During the fabrication of the corresponding film structures, the main RF discharge on the target was under pure Ar at a rate of 1.3·10 -1 Pa working pressure operation, power delivery kept at 2.75Wcm -2 . In the first processing step, the secondary discharge excited over the substrate by means of a second RF power supply is also kept constant at P b =15·10 -3 Wcm -2 . Deposition was performed on soda-lime glass substrates. The resulting ZnO-based layer has a thickness of 770 nm and a resistivity of 1.4 10 -3 Ω cm. It should be noted that this resistivity is the same as that of an AZO film of comparable thickness and prepared under the same conditions. However, lower resistivity values can be achieved under optimized deposition conditions (eg, higher substrate temperatures). The plasmon wa...
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