A kind of inalsb infrared detector surface passivation method
An infrared detector and detector chip technology, applied in the field of infrared detectors, can solve the problems of low reliability, high power consumption of infrared detector components, large volume, etc., to increase surface resistivity, reduce surface recombination rate and surface Effect of leakage current
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[0034]Example 1 The inalsb infrared detector chip passes the test results completed by optical and electrical test equipment:
[0035]Table 1 Performance test results of the infrared device of the above embodiment
[0036]
[0037]Table 2. MIS structure calculation results of the passivation film of the above embodiment
[0038]
[0039]By test structure analysis of Table 1, Table 2, the passivation method has a good passivation effect on the surface of the INALSB material, which can effectively reduce surface composite rates and increase surface resistance.
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