Graphene-metal heterojunction-based gas sensor array and preparation method thereof

A gas sensor and graphene technology, applied in the field of sensors, can solve problems such as excessive recovery time

Pending Publication Date: 2019-04-16
GUANGXI NORMAL UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the biggest disadvantage of single-layer graphene sensors is their long recovery time

Method used

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  • Graphene-metal heterojunction-based gas sensor array and preparation method thereof
  • Graphene-metal heterojunction-based gas sensor array and preparation method thereof
  • Graphene-metal heterojunction-based gas sensor array and preparation method thereof

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Embodiment Construction

[0094] The present invention will be further described below in conjunction with the accompanying drawings and examples of implementation.

[0095] Such as Figure 1 to Figure 3 Shown, the gas sensor array based on graphene-metal heterojunction described in the present invention, comprises SiO 2 / Si substrate 8; the SiO 2 / The middle position on the upper surface of the Si substrate 8 is provided with a main line 10; both ends of the main line 10 are provided with first connecting terminals 11;

[0096] Both sides of the main line 10 are provided with resistive sensors; the resistive sensors include metal electrodes, a graphene film 9 on the metal electrodes and a metal covering layer 12 on the top layer;

[0097] Described metal electrode all comprises two electrode units, and the upper surface of two electrode units is provided with continuous graphene film 9; The upper surface of graphene film just above the two electrode unit gaps is provided with metal coating 12; Two e...

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Abstract

The invention discloses a grapheme-metal heterojunction-based gas sensor array and a preparation method thereof. The grapheme-metal heterojunction-based gas sensor array is capable of detecting the types of gases and the concentration of the corresponding gases and has a fast response rate and a high recognition rate. The gas sensor array includes a substrate and a plurality of sets of grapheme-metal heterojunction-based resistive gas sensors formed on the substrate. The preparation method of the gas sensor array includes the following steps that: S1, a metal electrode array and conductive leads are processed on the substrate; S2, graphene is transferred to the substrate on which the metal electrode array is formed; S3, plasma etching is utilized to etch away excess graphene on the substrate, so that resistive gas sensors are formed; and S4, magnetron sputtering coating is adopted to process a cover layer at the top layer of the gas sensor. The grapheme-metal heterojunction-based gas sensor array and the preparation method thereof have good application prospects in mine operation, food safety detection, environmental monitoring, robot electronic nose and the like.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a method for preparing a graphene-metal heterojunction-based gas sensor array. Background technique [0002] A gas sensor is a device that integrates gas-sensitive materials. The adsorption of gas molecules by the sensitive material causes changes in its electrical properties, and finally obtains the functional relationship between changes in gas concentration and changes in electrical properties. Graphene, as an emerging two-dimensional nanomaterial, has been fully developed in gas sensors in recent years. Recent studies have shown that graphene gas sensors have the characteristics of low operating temperature, low power consumption, and high sensitivity. [0003] In 2007, Andre Heim's research group at the University of Manchester in the United Kingdom made a gas sensor for single-molecule detection with graphene for the first time. Mechanically exfoliated few-layer graphene ...

Claims

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Application Information

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IPC IPC(8): G01N27/30
CPCG01N27/30
Inventor 李全福朱小虎张祺刘卫华彭慧玲刘林生宋辉李廷会汪海船
Owner GUANGXI NORMAL UNIV
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