Wafer temperature sensor and position determining method and circuit design method in application thereof

Abstract

The invention belongs to the technical field of temperature detection and calibration in the metrology industry, and discloses a wafer temperature sensor which can be closely attached to a thermal conductivity cold and hot plate and can accurately measure the temperature of the cold and hot plate of the thermal conductivity measuring instrument by a large heat flux and fast response time of the wafer temperature sensor in a short time. The invention also discloses a position determining method for the wafer temperature sensor on the hot and cold plate of the thermal conductivity measuring instrument, wherein the position point of the hot and cold plate temperature condition of the thermal conductivity measuring instrument can best determined by the finite element simulation technology, andthe K-Means-Mean method is used to continuously eliminate singular values during data detection to finally obtain the optimal temperature value for characterizing the temperature effect. The invention also discloses a circuit design method for a wafer temperature sensor, which proves the accuracy of the measurement data of the wafer temperature sensor.

Description

technical field [0001] The present invention relates to a sheet temperature sensor and its position determination method and circuit design method in its application, in particular to a sheet temperature sensor suitable for detecting the temperature of a metal surface and its detection position determination method and circuit design method, the metal surface to be detected Including the cold and hot plate of the thermal conductivity tester, the digital adjustable heating plate and the microcomputer temperature control heating plate, etc. The invention belongs to the technical field of temperature detection and calibration in the metrology industry. Background technique [0002] Thermal conductivity is an important index to measure materials. Thermal conductivity tester is a common instrument for measuring thermal conductivity. Accurate detection of thermal conductivity tester is related to the lifeblood of many cutting-edge fields. [0003] Materials science is related to ...

AI Technical Summary

Problems solved by technology

[0008] The technical problem to be solved by the present invention is that in order to solve the problem that the temperature of the hot and cold plates of the thermal conductivity measuring instrument etc. has a large error in the daily detection process, a thin sheet temperature sensor is provided. The advantages of large heat flux through the temperature sensor and short response time;

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