Method for stimulating probe to vibrate in atomic force microscope

An atomic force microscope and probe technology, applied in scanning probe technology, scanning probe microscopy, measuring devices, etc., can solve problems such as imaging failure, increased equipment requirements, and decreased probe oscillation amplitude to achieve low performance Requirements, the effect of reducing equipment requirements and increasing the possibility of realization

Inactive Publication Date: 2019-06-11
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the driving force only acts on the root of the cantilever, when the probe tip scans the sample, the adhesive force and capillary force on the sample surface will generate a downward suction force on the tip, thereby inhibiting the probe oscillation and causing the probe oscillation amplitude Decrease, or even drop to zero, and then affect the scanning imaging, resulting in imaging failure
[0009] To avoid this situation, the cantilever is usually required to have a high elastic constant

Method used

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  • Method for stimulating probe to vibrate in atomic force microscope
  • Method for stimulating probe to vibrate in atomic force microscope
  • Method for stimulating probe to vibrate in atomic force microscope

Examples

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Embodiment 1

[0027] In this embodiment, an AFM model of Aglient 5500 is used. In the AFM, a nanometer-scale probe is fixed on a micrometer-scale elastic cantilever. The probe is a silicon probe with a force constant of 0.1 N / m.

[0028] In this embodiment, the sample to be tested is graphene, and the graphene is covered on a silicon substrate with a 250 nm deep hole structure to form a partially suspended graphene sample.

[0029] Such as figure 2 As shown, the piezoelectric transducer is fixed on the sample stage of the atomic force microscope, and the sample to be tested is fixed on the surface of the piezoelectric transducer by glycerin;

[0030] With the probe positioned above the sample, bring the probe close to the sample surface. The contact mode of the atomic force microscope can be used to make the tip touch the sample first, and then the tip can be raised, and the raising distance can be set to 5um-100um. In this embodiment, it is set to 10um.

[0031] The atomic force micros...

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Abstract

The invention provides a method for stimulating a probe to vibrate in an atomic force microscope. A piezoelectric transducer is arranged below the probe; the piezoelectric transducer generates mechanical vibration in the vertical direction under the action of a signal source; and the probe is vibrated under the stimulation of mechanical vibration waves. Compared with an existing method for stimulating a cantilever to vibrate by adopting a probe driver so as to drive the probe to vibrate, the method has the advantages that the tip of the probe can more easily get rid of the action of adhesion force and capillary force on the surface of a sample to vibrate stably, so that stable scanning imaging is facilitated, a high-resolution scanning image is obtained, and the high-performance requirement on the cantilever is reduced.

Description

technical field [0001] The invention relates to the technical field of atomic force microscopes, in particular to a method for exciting probe vibration in atomic force microscopes. Background technique [0002] Atomic Force Microscope (AFM) is a new instrument with atomic-level high resolution invented after Scanning Tunneling Microscope (STM). It has been widely used in semiconductors, nano functional materials, biology, chemical industry, food, pharmaceutical research and research experiments of various nano-related subjects in scientific research institutes. Become an essential tool for nanoscience research. [0003] In the atomic force microscope, a nanometer-scale probe is fixed on a sensitively manipulated micron-scale elastic cantilever. When the probe is close to the sample, the force between the atoms at the top and the surface atoms of the sample will bend the cantilever and deviate from the original Location. By reconstructing the three-dimensional image accord...

Claims

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Application Information

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IPC IPC(8): G01Q60/38
Inventor 魏艳萍卢焕明陈国新姚聪迪
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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