A valticrsi high-entropy alloy thin film and its application in seawater environment
A technology of high-entropy alloy and thin film, which is applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve the problems that cannot meet people's needs, and achieve the effect of low production cost and uniform composition
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[0036] In this embodiment, the substrate material is 304 stainless steel, and the surface of the substrate is an amorphous VAlTiCrSi high-entropy alloy thin film.
[0037] The preparation method of this VAlTiCrSi high-entropy alloy thin film is as follows:
[0038] Using magnetron sputtering technology to prepare a VAlTiCrSi high-entropy alloy film on the surface of the substrate mainly includes the following steps:
[0039] (1) if figure 1 As shown, select V target, Al target, Ti target, Cr target, and Si target, and stack and arrange each target with a thickness of 10 mm in the order of V-Al-Ti-Cr-Si in the vertical direction from top to bottom to form One target period; then, including 12 said target periods in the vertical direction, forming a composite target.
[0040] (2) Perform mechanical grinding and polishing on the surface of the substrate, ultrasonically clean it three times with petroleum ether, acetone and alcohol, and then dry it with flowing nitrogen; then, p...
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