Aluminum/aluminum oxide composite hydrogen resistance coating layer
A kind of aluminum oxide and hydrogen resistance technology, which is applied in coating, metal material coating process, ion implantation plating, etc., can solve the problems of large difference in thermal expansion coefficient and reduce hydrogen resistance penetration performance, so as to reduce thermal expansion mismatch and improve Thermal shock resistance and high bonding strength
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Embodiment 1
[0015] Deposition of an aluminum / alumina composite coating on 316 stainless steel. The metal aluminum target and the alumina target are respectively used. The aluminum target is powered by a DC power supply, the alumina target is powered by a radio frequency power supply, and Ar is used as the glow gas. When the back vacuum is better than 2×10 -4 After Pa, clean with Ar plasma bombardment for 15 min in the sputtering chamber. The aluminum / alumina composite thin film was obtained by sputtering aluminum target and alumina target at the same time. for 2 hours.
[0016] The aluminum content in the obtained composite coating was 85wt%, and the hydrogen permeation performance test was carried out on the obtained composite coating sample, and the hydrogen permeation reduction factor of the composite coating to 316 stainless steel was 133 at 600°C.
Embodiment 2
[0018] Deposition of an aluminum / alumina composite coating on 304 stainless steel. The metal aluminum target and the alumina target are respectively used. The aluminum target is powered by a DC power supply, the alumina target is powered by a radio frequency power supply, and Ar is used as the glow gas. When the back vacuum is better than 2×10 -4 After Pa, clean with Ar plasma bombardment for 15 min in the sputtering chamber. The aluminum / alumina composite thin film was obtained by sputtering the aluminum target and the alumina target at the same time. for 2 hours.
[0019] The aluminum content in the obtained composite coating was 60wt%, and the hydrogen permeation performance test was carried out on the obtained composite coating sample, and the hydrogen permeation reduction factor of the composite coating to 316 stainless steel at 600°C was 230.
Embodiment 3
[0021] Deposition of aluminum / alumina composite coatings on CLAM martensitic stainless steel. The metal aluminum target and the alumina target are respectively used. The aluminum target is powered by a DC power supply, the alumina target is powered by a radio frequency power supply, and Ar is used as the glow gas. When the back vacuum is better than 2×10 -4 After Pa, clean with Ar plasma bombardment for 15 min in the sputtering chamber. The aluminum / alumina composite thin film was obtained by sputtering aluminum target and alumina target at the same time. for 3 hours.
[0022] The aluminum content in the obtained composite coating was 43wt%. The hydrogen permeation performance test was carried out on the obtained composite coating sample. The hydrogen permeation reduction factor of the composite coating to 316 stainless steel at 600°C was 262.
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