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Impurity removal method for high-purity arsenic

A technology for high-purity arsenic and impurity elements, applied in the field of impurity removal of high-purity arsenic, can solve the problems of lowering economic value, lowering purity, affecting the purity and economic value of high-purity arsenic, and achieving low production cost, thorough impurity removal, Ease of mass production

Active Publication Date: 2021-07-13
广东先导微电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The existence of these impurities will affect the purity and economic value of high-purity arsenic. Therefore, a high-purity arsenic impurity removal method is urgently needed to remove these impurities, so as to avoid the reduction of its purity and economic value.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] Soak the used quartz tube in clean aqua regia for 2 hours, take out the quartz tube and rinse the quartz tube with ultrapure water until it is clean, put it into a hydrogenation reduction furnace for production, and after testing, the Si in the whole high-purity arsenic produced is The content is 288ppb, the S content is 2.3ppb, and the Na content is 1.5ppb. Put the unbroken whole root of high-purity arsenic in a vacuum device, use a vacuum pump to pump the vacuum degree of the vacuum device to 50Pa, heat the vacuum device to 300°C, keep it warm for 5 hours, and the surface layer of the whole root of high-purity arsenic with a thickness of 0.02mm is partially volatilized , the impurity elements attached to the surface part of the whole high-purity arsenic also volatilize. The impurity content on the surface of the whole high-purity arsenic was detected, and the Si content was 2.8ppb, the S content was 1.2ppb, and the Na content was 1.1ppb. The whole root of high-purity...

Embodiment 2

[0041]Soak the used quartz tube in clean aqua regia for 3 hours, take out the quartz tube and rinse the quartz tube with ultrapure water until it is clean, put it into a hydrogenation reduction furnace for production, and after testing, the Si in the whole high-purity arsenic produced is The content is 251 ppb, the S content is 1.8 ppb, and the Na content is 1.4 ppb. Put the unbroken whole root of high-purity arsenic in a vacuum device, use a vacuum pump to pump the vacuum degree of the vacuum device to 50Pa, and heat the vacuum device to 390°C, keep it warm for 2 hours, and the surface layer of the whole root of high-purity arsenic with a thickness of 0.05mm is partially volatilized , the impurity elements attached to the surface part of the whole high-purity arsenic also volatilize. The impurity content on the surface of the whole high-purity arsenic was detected, and the Si content was 3.2ppb, the S content was 1ppb, and the Na content was 1ppb. The whole root of high-puri...

Embodiment 3

[0043] Soak the used quartz tube in clean aqua regia for 2.5 hours, take out the quartz tube and rinse the quartz tube with ultrapure water until it is clean, put it into a hydrogenation reduction furnace for production, and after testing, the whole high-purity arsenic produced is The Si content was 267 ppb, the S content was 2.0 ppb, and the Na content was 1.6 ppb. Put the unbroken whole root of high-purity arsenic in a vacuum device, use a vacuum pump to pump the vacuum degree of the vacuum device to 50Pa, and heat the vacuum device to 600°C, keep it warm for 1 hour, and the surface layer of the whole root of high-purity arsenic with a thickness of 0.10mm is partially volatilized , the impurity elements attached to the surface part of the whole high-purity arsenic also volatilize. The impurity content on the surface of the whole high-purity arsenic was detected, and the Si content was 3.2ppb, the S content was 1ppb, and the Na content was 1ppb. The whole root of high-purity...

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Abstract

The invention relates to a method for removing impurities of high-purity arsenic, which comprises the following steps: S1, pretreatment of quartz tubes; S2, volatilization of surface arsenic; S3, crushing and screening; S4, deep removal of impurities. This method utilizes the property that arsenic can be sublimated under vacuum conditions, and provides a method for removing Si, S, Na, Mg, Fe, Zn impurity elements from high-purity arsenic. , Easy to scale production, low production cost. The purity of the processed product can reach more than 7.5N, the content of Si is less than 10ppb, and the content of S, Na, Mg, Fe, Zn is less than 2ppb, which meets the requirements of MBE source.

Description

technical field [0001] The invention relates to the field of preparation of high-purity arsenic, in particular to a method for removing impurities of high-purity arsenic. Background technique [0002] High-purity arsenic is the main raw material for the synthesis of gallium arsenide, zinc arsenide, indium arsenide, arsenic selenide and other compounds. Widely used in integrated circuits, chip devices, Hall elements, chalcogenide glass, 5G communications and other fields. In recent years, with the development of high-tech industries, the application fields of high-purity arsenic have become more and more extensive, and the requirements for the purity of high-purity arsenic have become higher and higher. [0003] Among them, the common method for producing high-purity arsenic is the hydrogenation reduction method of arsenic chloride. The previous stage of purification has purified arsenic trichloride to above 7.5N. Since the hydrogenation reduction process requires high temp...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C22B30/04
CPCC22B30/04
Inventor 刘留曾小东郭金伯朱刘何志达陈昭龙
Owner 广东先导微电子科技有限公司