Evaporation film-coating material NbO2 and preparation method thereof

An evaporative coating and optical coating technology, applied in vacuum evaporation coating, metal material coating process, sputtering coating and other directions, can solve problems such as microscopic defects of the film layer, improve the level of smoothness, improve the level of defects, improve The effect of yield

Inactive Publication Date: 2019-07-19
徐川
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In order to overcome the deficiencies of the prior art and aim at the problem that niobium oxide materials are prone to film microscopic defects in the vacuum evaporation coating technology, the present invention provides a NbO2 evaporation coating material with lower sputtering than traditional Nb2O5 coating materials

Method used

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Embodiment Construction

[0019] The evaporation coating material NbO2 described in the invention is used to replace the traditional Nb2O5 coating material in the vacuum evaporation coating process.

[0020] A preparation of evaporation coating material NbO of the present invention The process is as follows:

[0021] (1) According to the total weight of 10kg, the selected materials are weighed according to the weight ratio, and sieved into stainless steel containers one by one. After hand mixing, sieve again. And repeat the process of mixing and sieving several times until the materials are fully mixed.

[0022] (2) Weigh out 5%-10% deionized water of the total weight of the mixture, and uniformly mix the water into the mixture, and granulate the mixed materials by means of compression granulation.

[0023] (2) The material formula is as follows; Nb2O5 85%-96%; Al2O3 5%-1%, C powder 10%-3%.

[0024] (3) Place the manufactured particles in a crucible, and perform vacuum sintering at 1000°C-1500°C for...

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Abstract

The invention relates to an evaporation film-coating material NbO2 and provides a preparation method. A mixture of NbO and Al2O3 serves as a main component of the evaporation film-coating material NbO2; the ratio of NbO to Al2O3 in the mixture is (99%-90%):(1%-10%); the mixture is formed through vacuum melting after the stirring and mixing of NbO, Al2O3 and a reducing agent at a ratio; the evaporation film-coating material NbO2 is used for the preparation of a Nb2O5 thin film in a vacuum evaporation film-coating manner; and the thin film is used for the preparation of an optical filter/a high-reflection thin film. The preparation method provided by the invention has the beneficial effects that due to the use of C as the reducing agent and the doping of Al2O3, the melting point of the evaporation film-coating material NbO2 can be effectively lowered and the production cost can be reduced; compared with the use of a conventional Nb2O5 film-coating material, the use of the evaporation film-coating material NbO2 for the preparation of the Nb2O5 thin film through evaporation film-coating has the advantage that the thin film surface smoothness can be effectively improved; and great helpcan be offered to the improvement of the yield of thin film products.

Description

technical field [0001] The invention relates to a vacuum evaporation coating material, in particular to a preparation method of the evaporation coating material. Background technique [0002] Vacuum evaporation coating refers to the process of using coating materials to form a uniform film with a certain thickness on the surface of optical parts by means of vacuum evaporation. Depending on the type and thickness of the selected material, different combinations of optical films will have different properties. Manufacturers of optical components will choose different coating materials for coating according to coating requirements and material properties. [0003] The common way to prepare Nb2O5 thin film by vacuum evaporation is to use electron gun to heat and evaporate Nb2O5 material. Under high vacuum conditions, the material is placed in a metal crucible protected by water cooling, and an electron beam is used to scan the surface of the evaporated material for heating. W...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/08
CPCC23C14/24C23C14/083C23C14/081
Inventor 徐川
Owner 徐川
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