Vacuum coating device capable of improving efficiency
A vacuum coating and high-efficiency technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve problems such as unfavorable mass production and reduced vacuum coating efficiency
Inactive Publication Date: 2019-07-19
广东天成真空科技有限公司
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Problems solved by technology
However, in the existing evaporation coating process, it is often necessary to manually add new film materials to the evaporator to ensure that the evaporator can continue to evaporate the film material to achieve the coating operation. It reduces the efficiency of vacuum coating, which is not conducive to mass production
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[0025] The embodiments of the present invention will be described in detail below with reference to the accompanying drawings, but the present invention can be implemented in many different ways defined and covered by the claims.
[0026] Such as Figure 1 to Figure 4 As shown, a kind of efficient vacuum coating device provided by the present invention comprises a vacuum coating chamber 10, a vacuum pump system 11 which is arranged on the outer peripheral wall of the vacuum coating chamber 10 and is used for vacuumizing the vacuum coating chamber 10, and is arranged in a vacuum coating chamber 10. The evaporator assembly 20 for evaporating the film material a in the coating chamber 10, the substrate frame 12 arranged in the vacuum coating chamber 10 and positioned above the outline of the evaporator assembly 20, and the outside of the vacuum coating chamber 10 and used for feeding the evaporator Component 20 adds the feeding assembly 30 of membrane material a; Feeding assembly...
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The invention relates to the technical field of vacuum coating, in particular to a vacuum coating device capable of improving efficiency. The vacuum coating device comprises a vacuum coating chamber,a vacuum pump system, an evaporator assembly and a feeding assembly; the feeding assembly comprises a feeding chamber, a feeding bin, a supplying mechanism and a supplying tube, a feeding port and a discharging port are formed in the two ends of the supplying tube correspondingly, the height of the feeding port is higher than that of the discharging port, and a feeding valve is arranged at the bottom of the feeding bin. According to the vacuum coating device capable of improving the efficiency, film materials loaded on the feeding bin are transferred to the feeding port through the feeding mechanism, and the film materials entering into the feeding port can eventually be transferred from the discharging port into the evaporator assembly, so that new film materials are added to the evaporator assembly timely and conveniently; and during adding of the new film materials to the evaporator assembly, the vacuum coating device is extremely simple, convenient and fast, the number and time ofmanually adding the film materials to the evaporator assembly are reduced, thus the efficiency of the whole vacuum coating device can be improved, and the high practical value and market popularization value are achieved.
Description
technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a vacuum coating device with improved efficiency. Background technique [0002] Vacuum coating refers to a method of heating metal or non-metallic materials under high vacuum conditions to evaporate and condense on the surface of the coating (metal, semiconductor or insulator) to form a thin film. For example, vacuum aluminum plating, vacuum chrome plating, etc. [0003] The existing vacuum coating mainly has three forms, that is, evaporation coating, sputtering coating and ion coating. In evaporation coating, a resistance heater is often used to heat the evaporation film. This equipment has simple structure, low cost and reliable use. It can be used for Film materials with a low evaporation melting point are especially suitable for mass production that does not require high film quality. However, in the existing evaporation coating process, it is often necessary to manu...
Claims
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IPC IPC(8): C23C14/26C23C14/50
CPCC23C14/246C23C14/26C23C14/50
Inventor 王孟良
Owner 广东天成真空科技有限公司