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Bilateral misplaced differential confocal ultra-large curvature radius measurement method

A differential confocal and radius measurement technology, which is applied to measuring devices, instruments, and optical devices, can solve the problems of low precision in fixed focus, difficult precision length measurement, and long measurement optical path, so as to eliminate common mode noise and improve The effect of measurement accuracy and high-precision measurement

Active Publication Date: 2019-07-30
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0012] 1) The focal depth is long, affected by the diffraction effect, the focus accuracy of "cat's eye" and "confocal position" is low;
[0013] 2) The radius is large and the measurement optical path is long, which is difficult to measure precisely due to the interference of the measurement environment and system drift;

Method used

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  • Bilateral misplaced differential confocal ultra-large curvature radius measurement method
  • Bilateral misplaced differential confocal ultra-large curvature radius measurement method
  • Bilateral misplaced differential confocal ultra-large curvature radius measurement method

Examples

Experimental program
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Effect test

Embodiment 1

[0049] When the spherical element 6 to be tested is a concave lens with a diameter of D=150mm, the measurement of the super large radius of curvature of the bilateral misalignment differential confocal is shown in the attached Figure 5 As shown, the measurement steps of the bilateral dislocation differential confocal ultra-large radius of curvature measurement method are:

[0050] a) Start the measurement software of the main control computer 23, turn on the laser 28, and the light emitted by the laser 28 passes through the microscope objective lens 29 and the pinhole 30 to form a point light source 1. The light emitted by the point light source 1 passes through the beam splitter 2 , the collimating lens and the parallel flat crystal 4 and then irradiates on the spherical element 6 to be tested.

[0051] b) if figure 1 , adjust the measured spherical element 6 so that it has the same optical axis as the parallel flat crystal 4 and the collimator lens 3, so that the parallel ...

Embodiment 2

[0061]When the spherical element 6 to be tested is a concave lens with a diameter of D=150mm, the measurement of the super large radius of curvature of the bilateral misalignment differential confocal is shown in the attached Figure 6 As shown, the measurement steps of the bilateral dislocation differential confocal ultra-large radius of curvature measurement method are:

[0062] a) Start the measurement software of the main control computer 23, turn on the laser 28, and the light emitted by the laser 28 passes through the microscope objective lens 29 and the pinhole 30 to form a point light source 1. The light emitted by the point light source (1) passes through the beam splitter 2, the collimator lens 3 and the parallel flat crystal 4, and then irradiates on the spherical element 6 to be tested.

[0063] b) Adjust the measured spherical element 6 so that it has the same optical axis as the parallel flat crystal 4 and the collimator lens 3, so that the parallel light beam em...

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Abstract

The invention discloses a bilateral misplaced differential confocal ultra-large curvature radius measurement method, belonging to the technical field of optical precision measurement. According to themethod, in a confocal measurement system, firstly, large and small virtual pinhole detection areas are set through software on an airy disk image detected at CCD and two confocal characteristic curves detected by the CCD are sharpened through subtraction treatment, then, bilateral misplaced differential subtraction is executed for the sharpened confocal characteristic curve so as to obtain a high-sensitivity differential confocal characteristic curve; secondly, based on a null point of the bilateral misplaced differential confocal characteristic curve and a focal point of the confocal measurement system are accurately corresponding to the characteristics, high-precision focus-fixed locating is executed for each characteristic position point in ultra-large curvature radius measurement, andconsequently, high-precision measurement of ultralong focal length. Compared with the existing large curvature radius measurement method, the method provided by the invention has the advantages, suchas high precision, high environment interference resistance and simple structure, and has wide application foreground in the technical field of optical precision measurement.

Description

technical field [0001] The invention relates to a method for measuring a bilateral displacement differential confocal ultra-large curvature radius, and belongs to the technical field of precision measurement of optical element parameters. Background technique [0002] In optical systems, inertial navigation systems, and aircraft engine transmission systems, spherical elements are one of the most important elements. The radius of curvature of the spherical element is the most critical parameter to determine the overall performance of the element, so it is of great significance to measure the radius of curvature of the spherical element with high precision. [0003] For the measurement of the radius of curvature of a spherical surface, the existing measurement methods are: spherical template method, spherometer method, self-collimation method, interferometer method, knife-edge meter method, Newton ring method, laser shearing interferometer method and Mohr Segregation method, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/255
CPCG01B11/255
Inventor 赵维谦邱丽荣
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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