Coating for metal bipolar plates of fuel cells and preparation technology
A metal bipolar plate and fuel cell technology, applied in fuel cells, circuits, electrical components, etc., can solve the problems of low manufacturing cost, poor mechanical strength, and low processing efficiency
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[0030] In one embodiment, after the vacuum chamber is sealed, it is evacuated to 3×10 -3 Pa, the first step is argon ion etching (voltage 1000V, current 1A), time 3min; the second step is composite transition layer deposition, high-purity Ti target (≥99.5%, voltage 300-0V, current 30-0A), high-purity Nitrogen (≥99.99%, 100-0sccm), high-purity graphite target (≥99.5%, voltage 1200V, current 5-30A), time 1min, the third step uses HIPIMS sputtering high-purity graphite target (≥99.5%, voltage 1200V , current 30A), time 10min, the thickness of the formed coating is 0.2 microns.
[0031] In another embodiment, after the vacuum chamber is sealed, it is evacuated to 3×10 -3Pa, the first step is argon ion etching (voltage 1200V, current 1A), time 3min; the second step is composite transition layer deposition, high-purity Ti target (≥99.5%, voltage 600-0V, current 20-0A), high-purity Nitrogen (≥99.99%, 80-0sccm), high-purity graphite target (≥99.5%, voltage 1000V, current 5-30A), tim...
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