Microwave CVD nano waterproof compound technology

Abstract

The invention relates to a microwave CVD nano waterproof compound technology. The compound technology comprises the following steps of (1), pretreatment of a circuit board; (2) preliminary treatment of the circuit board; (3), pumping a vacuum reaction chamber till the vacuum degree is 20KPa or below, placing the vacuum reaction chamber in a microwave region with the frequency of 500-1000 GHz, introducing first gas at 0.5-2 L / min, keeping the vacuum degree in the vacuum reaction chamber at 10-30 kPa, ionizing the first gas to form an active ion monomer, and depositing a barrier insulating filmlayer on the surface of the circuit board; (4), pumping out the gas in the vacuum reaction chamber, introducing second gas to make the pressure in the vacuum reaction chamber reach 10-200 kPa, placingthe second gas at a microwave region with the frequency of 800-1200 GHz to ionize the second gas so as to form a hydrophobic oleophobic corrosion resistant coating with the thickness of 10-500 nm onthe surface of the barrier insulating film layer obtained from the step (3); and (5), post-treatment, and specifically introduced air into the vacuum reaction chamber to reach the standard atmospheric pressure, and taking out the circuit board. The microwave CVD technology has the characteristics of high efficiency, the deposition time is only half of that of a current technology in the industry,and the deposition efficiency is improved by about 2 times.

Description

technical field [0001] The invention specifically relates to a microwave CVD nanometer waterproof composite process. Background technique [0002] The current nano-waterproofing process mainly uses high-frequency or intermediate-frequency CVD to coat products (usually circuit boards) with fluorocarbons as the working gas. This process takes a long time and slow deposition speed. The utilization rate is also relatively low, and the uniformity and compactness of the final deposited coating are relatively poor, and the high-level waterproof and hydrophobic properties cannot be achieved. Contents of the invention [0003] In order to overcome the disadvantages of the above-mentioned situation, the present invention aims to provide a technical solution capable of solving the above-mentioned problems. [0004] A microwave CVD nanometer waterproof composite process, comprising the following steps: [0005] 1. A microwave CVD nanometer waterproof composite process, characterized...

AI Technical Summary

Problems solved by technology

[0002] The current nano-waterproofing process mainly uses high-frequency or intermediate-frequency CVD to coat products (usually circuit boards) with fluorocarbons as the working gas. This process takes a long time and slow deposition speed. The utilization rate is also relatively low, and the uniformity and compactness of the final deposited coating are relatively poor, and the high-level waterproof and hydrophobic properties cannot be achieved.