Femtosecond laser array micropore machining system based on spatial beam shaping

A technology of femtosecond laser processing and beam shaping, which is applied in the field of laser applications, can solve the problems affecting the uniformity of subsequent array microholes, uneven energy distribution of sub-laser, and non-universal array microholes, so as to avoid beam splitting Effects of non-uniformity, improvement of uniformity and quality, and improvement of efficiency

Inactive Publication Date: 2019-09-17
TSINGHUA UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among them, the Gaussian distribution of the laser beam splitter easily leads to uneven energy distribution of the sub-laser after beam splitting, which affects the uniformity of the microholes in the subsequent array.
Although prism beam splitting and dif

Method used

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  • Femtosecond laser array micropore machining system based on spatial beam shaping
  • Femtosecond laser array micropore machining system based on spatial beam shaping
  • Femtosecond laser array micropore machining system based on spatial beam shaping

Examples

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Embodiment 1

[0029] Embodiment 1: Array microholes distributed in regular hexagons are obtained by femtosecond laser space shaping.

[0030] The specific processing steps of this embodiment 1 are as follows: turn on the femtosecond laser 1, wait for 20-30 minutes to stabilize the light output of the femtosecond laser, and place each optical path element according to the figure 1 Sequentially placed on the optical platform, and then the femtosecond laser is collimated and adjusted so that it can finally irradiate the sample without focusing. The femtosecond laser pulse repetition frequency of the femtosecond laser 1 is set to 100 Hz, and the beam waist diameter before laser focusing is controlled at 7 mm. Under the operation of the control program of the six-dimensional translation stage 16, the focal plane of the processing objective lens 14 is determined at the end of the processing optical path, and then the phase of the array microholes corresponding to the regular hexagonal distributio...

Embodiment 2

[0031] Example 2 Obtaining arrayed microholes with regular octagonal distribution by femtosecond laser space shaping

[0032] The specific processing steps of this embodiment 2 are as follows: turn on the femtosecond laser 1, wait for 20-30 minutes to stabilize the output of the femtosecond laser, and place each optical path element according to the figure 1 Sequentially placed on the optical platform, and then the femtosecond laser is collimated and adjusted so that it can finally irradiate the sample without focusing. The femtosecond laser pulse repetition frequency of femtosecond laser 1 is set to 200 Hz, and the beam waist diameter before laser focusing is controlled at 7 mm. Under the operation of the control program of the six-dimensional translation stage 16, the focal plane of the processing objective lens 14 is determined at the end of the processing optical path, and then the phase of the array microholes corresponding to the regular octagonal distribution is loaded ...

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Abstract

The invention relates to a femtosecond laser array micropore machining system based on spatial beam shaping and belongs to the technical field of laser application. According to the machining system provided by the invention, a spatial light modulator (SLM) is utilized, by designing different phase positions, a single femtosecond laser beam is shaped into a plurality of array light fields featuring specific spatial distribution, the laser repeat frequency, the laser beam waist radius and the laser pulse energy are adjusted, finally, a light path is established through optical elements so as to focalize the shaped femtosecond laser to the surface of a sample, high-quality, no-contact, high-efficiency and large-area array micropore machining on multiple types of materials is achieved, and the repeatability and flexibility are high. When the system is applied to array micropore machining, beam splitting nonuniformity caused by Gaussian distribution of the laser is effectively avoided, and the array micropore uniformity and quality are improved. The quantity and distribution of array micropores can be freely adjusted and controlled through SLM load phase position variations, multiple types of elements do not need to be configured, and adjustability is high.

Description

technical field [0001] The invention relates to a femtosecond laser processing array microhole system based on spatial beam shaping, which belongs to the technical field of laser applications. Background technique [0002] In recent years, when the laser is applied to the fields of micro-sensor manufacturing and micro-chip packaging, it is often necessary to process array micro-holes of various shapes and quantities. These arrayed microholes have extremely high requirements on the precision and quality of the microholes, such as size and shape, aspect ratio, etc., and also require high overall processing efficiency. How to achieve high-quality, low-cost, high-efficiency and large-area microhole arrays Processing has become a difficult problem in modern manufacturing. Traditional processing methods such as micro-EDM, electrochemistry, micro-drilling and other technologies have certain defects in various aspects. The femtosecond laser has a certain reliability due to its cha...

Claims

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Application Information

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IPC IPC(8): B23K26/382B23K26/06B23K26/067
CPCB23K26/382B23K26/06B23K26/0673B23K26/0624B23K26/0648B23K26/384B23K26/0861B23K26/0643B23K26/083
Inventor 姜澜闫剑锋李佳群
Owner TSINGHUA UNIV
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