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A compound two-dimensional strain sensor of resistive variable capacitive variable and its preparation method

A two-dimensional strain and sensor technology, which is used in the measurement of fluid pressure using capacitance changes, the measurement of the property force of piezoelectric resistance materials, and the measurement of fluid pressure by changing ohmic resistance. Reduce the signal-to-noise ratio and high process requirements, achieve the effects of high sensitivity characteristics, simple manufacturing process and good development prospects

Active Publication Date: 2020-07-14
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The resistive two-dimensional tensile strain gauge with an orthogonal pattern needs to align the center of the electrode pattern on the upper layer and the lower layer, which requires high process requirements; Refers to the capacitance, and the double capacitance is easy to interfere with each other during tensile strain, resulting in a decrease in the signal-to-noise ratio

Method used

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  • A compound two-dimensional strain sensor of resistive variable capacitive variable and its preparation method
  • A compound two-dimensional strain sensor of resistive variable capacitive variable and its preparation method
  • A compound two-dimensional strain sensor of resistive variable capacitive variable and its preparation method

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Embodiment 1

[0030] Such as Figure 5 The RCV composite two-dimensional strain sensor implemented in this embodiment adopts the structural design of the serpentine conductive upper plate 501, the insulating dielectric layer 502, the serpentine conductive lower plate 503, and the encapsulation layer 504 of the parallel plate capacitor.

[0031] according to the structure figure 1 The serpentine conductive upper plate includes a flexible substrate 104, silver nanowire conductive network 106, and metal electrodes 107; the insulating dielectric layer 104 serves as the flexible base of the serpentine conductive upper plate; the serpentine conductive lower plate includes a flexible substrate 101, The silver nanowire conductive network 102, the metal electrode 103; the encapsulation layer 105 uses polydimethylsiloxane to encapsulate the two-dimensional strain sensor. The preparation process of the two-dimensional strain sensor with silver nanowire as conductive material, copper as metal electrod...

Embodiment 2

[0048] The conductive material of the snake-shaped conductive upper and lower plates is not limited to the use of metal materials with micro-nano structures, but also metal carbon materials with micro-nano structures. The invention discloses a method for preparing a two-dimensional strain sensor of a capacitive compound.

[0049] (1) The composition ratio and preparation method of the flexible substrate: the same as the preparation method in Step 1 of Example 1.

[0050] (2) Preparation method of serpentine pattern mask: the same as the preparation method of step 2 of embodiment 1.

[0051] (3) Preparation method of serpentine conductive bottom plate:

[0052] The snake-shaped conductive lower plate uses multi-walled carbon nanotubes as the conductive material. , purity: 98%, model: M3, Beijing Boyu Gaoke New Material Technology Co., Ltd.) 50mg, deionized water 10mL, SDS sodium dodecyl sulfate 50mg mixed, ultrasonic vibration treatment for 1 hour, so that the multi-walled ca...

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Abstract

The invention discloses a two-dimensional strain sensor combined with resistance-variable-capacitance change and a preparation method thereof. The two-dimensional strain sensor proposed by the invention adopts a three-layer structure design of an upper plate, an insulating dielectric layer, and a lower plate of a parallel-plate capacitor. The conductive material of the upper and lower plates is metal with a micro-nano structure, carbon conductive material or metal and carbon mixed conductive material, and the bipolar plate pattern adopts a serpentine structure design. Tensile strain sensor. The invention detects the tensile strain in the horizontal direction through the phenomenon of capacitive change, detects the tensile strain in the vertical direction through the phenomenon of resistive change, and uses the compound form of resistive change and capacitive change to detect the tensile strain in the two-dimensional orthogonal direction. The characteristic of stretching; and the resistive stretching sensor adopts a permeable conductive network structure and has good sensitivity.

Description

technical field [0001] The invention relates to the field of strain sensor devices, in particular to a two-dimensional strain sensor and a preparation method thereof. Background technique [0002] The traditional tensile strain gauge is based on the piezoresistive effect to detect the force on the object. It uses metal film, metal wire and semiconductor as the sensing material. Due to the high rigidity of metal and semiconductor materials, it cannot produce large Deformation, and does not have stretchable characteristics, resulting in traditional tensile strain gauges based on metal and semiconductor materials, even if they can have high sensitivity, they can only be used in a small stretching range (less than 5%), not applicable In the field of flexible electronic devices and smart wearables in the future. [0003] The new flexible and stretchable strain sensor has received widespread attention in recent years. Compared with the traditional tensile strain gauge, it has the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/18G01L1/14G01L9/06G01L9/12
CPCG01L1/146G01L1/18G01L9/06G01L9/12
Inventor 张晓升李国科张新然刘盾鲍景富
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA