A kind of microscopic spectrum measurement device and method based on optical chip substrate
An optical chip and spectral measurement technology, applied in the field of microspectral analysis, can solve the problems of low analysis efficiency and slow collection speed, and achieve the effects of good scalability, simple structure and long service life
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[0052] A microscopic spectrum measurement device based on an optical chip substrate includes an illumination laser light source 1, a beam expander lens 2, a near-end laser reflector 3, a focusing microscopic objective 4, a wide-spectrum coupling object-loading optical chip 5, and a collecting microscopic objective 6 , a dichroic mirror 7, an imaging lens 8 and an image sensor 9, wherein the wavelength of the illumination laser light source 1 is 532nm, which can excite carboxylic acid fluorescent molecules in the analyte. The wide-spectrum coupling object-loading optical chip 5 is composed of a polymer layer, a metal layer, a defect layer and a photonic crystal layer, wherein the polymer layer is PMMA with a thickness of 5nm; the metal layer material is silver with a thickness of 30nm; the defect layer is silicon dioxide, The thickness is 165nm; the photonic crystal layer is deposited alternately by silicon dioxide and silicon nitride, the thicknesses are respectively 125nm and ...
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