High-temperature-resistant flexible sensor and preparation method thereof

A flexible sensor, high temperature resistant technology, applied in the field of sensors, can solve the problems of low melting point, flexible sensors have not yet been prepared, and the application of flexible sensors is limited.

Inactive Publication Date: 2019-11-15
SOUTH CHINA NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Since flexible substrates are mainly organic materials such as polymer materials, their melting points are low and they are easily damaged at high temperatures (≧300°C). Therefore, the working temperature of most flexible sensors is at room

Method used

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  • High-temperature-resistant flexible sensor and preparation method thereof
  • High-temperature-resistant flexible sensor and preparation method thereof
  • High-temperature-resistant flexible sensor and preparation method thereof

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preparation example Construction

[0045] The preparation method of the high temperature resistant flexible sensor of the present invention mainly comprises the following steps:

[0046] S1: Preparation of mica substrate.

[0047] Preferably, the specific preparation steps of the mica substrate are as follows: first cut the mica sheet into a mica sheet with a thickness of about 0.2-0.5 mm; then stick the mica sheet on the tape, and then slowly bend the tape so that the bottom layer A layer of mica is separated from the mica flakes; this step is repeated until the thickness of the mica flakes reaches 10-100 μm.

[0048] Preferably, the mica sheet is a rectangular sheet material purchased commercially; the adhesive tape is a double-sided polyimide high-temperature adhesive tape; the width of the adhesive tape is the same as that of the mica sheet.

[0049] S2: preparing a conductive layer on the surface of the mica substrate.

[0050] Preferably, the conductive layer is La 0.7 Sr 0.3 MnO 3 film. The La 0.7...

Embodiment 1

[0059] The preparation method of the high temperature resistant flexible sensor of the present invention is as follows: preparing a mica substrate, then preparing a conductive layer on the surface of the mica substrate, and finally forming a metal electrode on the conductive layer to obtain a high temperature resistant flexible sensor. Specifically include the following steps:

[0060] S1: Preparation of mica substrate:

[0061] First cut the mica sheet into a mica sheet with a thickness of about 0.2-0.5 mm; then stick the mica sheet on a double-sided polyimide high-temperature tape so that the width of the tape is the same as the width of the mica sheet; then Slowly bend the tape to separate the bottom layer of mica from the mica flakes; repeat this step until the thickness of the mica flakes reaches 10 µm.

[0062] S2: Prepare a conductive layer on the surface of the mica substrate:

[0063] By pulsed laser deposition method, the laser is placed on the La 0.7 Sr 0.3 MnO ...

Embodiment 2

[0067]The preparation steps of the high-temperature-resistant flexible sensor of this embodiment 2 are the same as those of the embodiment 1, and the difference lies in the different condition parameters in the preparation process.

[0068] S1: Preparation of mica substrate:

[0069] First cut the mica sheet into a mica sheet with a thickness of about 0.2-0.5 mm; then stick the mica sheet on a double-sided polyimide high-temperature tape so that the width of the tape is the same as the width of the mica sheet; then Slowly bend the tape to separate the bottom layer of mica from the mica flakes; repeat this step until the thickness of the mica flakes reaches 50 µm.

[0070] S2: Prepare a conductive layer on the surface of the mica substrate:

[0071] By pulsed laser deposition method, the laser is placed on the La 0.7 Sr 0.3 MnO 3 target surface, La 0.7 Sr 0.3 MnO 3 The surface of the target is instantly melted into La 0.7 Sr 0.3 MnO 3 Plasma, and deposited on the mica...

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Abstract

The invention relates to a high-temperature-resistant flexible sensor and a preparation method thereof. The high-temperature-resistant flexible sensor comprises a mica substrate, a conductive layer covering the surface of the mica substrate, and a metal electrode formed on the conductive layer. According to the invention, since the conductive layer grows on the mica, the prepared flexible sensor has advantages of good high-temperature resistance performance, simple structure, and light weight; and the manufacturing process using pulsed laser deposition is simple and is compatible with the traditional coating process and the semiconductor process, so that the photolithography and ion etching are performed and thus the industrial production of flexible sensors is realized simply and efficiently.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a high temperature resistant flexible sensor and a preparation method thereof. Background technique [0002] A flexible sensor is an electronic component that converts environmental signals into electrical signals. Due to its flexible characteristics, compared with traditional rigid sensors, flexible sensors will not be damaged due to deformation, so they can be applied to a wider range of applications. Flexible sensors can be integrated in gloves, clothing, bionic prostheses, and even inside the human body to collect signals, and have potential applications in human motion detection, health care, artificial intelligence, etc. [0003] The flexible sensor in the prior art mainly includes a flexible substrate, a conductive layer and a metal electrode; the conductive layer is covered on the flexible substrate, and then the conductive layer is connected to the metal electrode to fo...

Claims

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Application Information

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IPC IPC(8): G01D5/12G01D5/16C23C14/08C23C14/28C23C14/18C23C14/04
CPCC23C14/04C23C14/08C23C14/18C23C14/28G01D5/12G01D5/16
Inventor 陆旭兵郭敏杨成
Owner SOUTH CHINA NORMAL UNIVERSITY
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