Flexible capacitive sensor fabricated by employing silver nanowire flexible electrode and fabrication method of flexible capacitive sensor

A technology of silver nanowires and flexible electrodes, which is applied in the field of capacitive sensor research, can solve the problems of increasing the sensitivity of capacitive sensors, poor adhesion and flexibility alone, high conductive filling materials, etc., and achieves good biocompatibility characteristics and wide pressure detection range. , the effect of high sensitivity

Inactive Publication Date: 2019-11-15
BEIHANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] The technical solution of the present invention: In order to overcome the problems existing in the current flexible capacitive sensors, a flexible capacitive sensor and a preparation method prepared by using silver nanowire flexible electrodes are provided. The method of material solves the problem of poor adhesion between metal layer and flexible material alone and the need for high conductive filling materials to prepare electrodes by mixing conductive materials and flexible materials. At the same time, the conductive network of silver nanowires has the ability to resist repeated bending, ensuring the flexibility of electrodes At the same time, the conductive path is guaranteed; the sensitivity of the capacitive sensor is increased by preparing a porous flexible dielectric layer and reducing the overall modulus, and has a good linear relationship

Method used

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  • Flexible capacitive sensor fabricated by employing silver nanowire flexible electrode and fabrication method of flexible capacitive sensor
  • Flexible capacitive sensor fabricated by employing silver nanowire flexible electrode and fabrication method of flexible capacitive sensor
  • Flexible capacitive sensor fabricated by employing silver nanowire flexible electrode and fabrication method of flexible capacitive sensor

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Experimental program
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Effect test

Embodiment 1

[0053] (1) According to the ratio of flexible polymer and curing agent mass ratio of 10:1, mix and stir evenly to obtain PDMS prepolymer solution, let it stand for 15 minutes for degassing treatment, use rod coating method, use glass rod to dip PDMS and concrete Apply the solution on the silicon wafer and coat the PDMS film with uniform thickness on the silicon wafer, let it stand for 40 minutes to remove air bubbles, and cure at 80°C for 40 minutes to obtain the PDMS film, cut off the PDMS with the required electrode shape (1mm×1mm) with a knife, and obtain the corresponding electrode Shaped grooves serve as templates for electrode fabrication.

[0054] (2) Put the template with the silicon wafer on the hot stage, set the temperature of the hot stage to 50°C, and drop the silver nanowire solution in the template, heat and evaporate the solvent to obtain an electrode pattern with uniform distribution of silver wires; transfer the silicon wafer to On the table at room temperatu...

Embodiment 2

[0059] (1) According to the mass ratio of flexible polymer and curing agent of 10:1, mix and stir evenly to obtain the PDMS prepolymer solution, let it stand for 15 minutes for degassing treatment, use a glass rod to dip the PDMS prepolymer, and coat the silicon wafer with A PDMS film with uniform thickness was left to stand for 40 minutes to remove air bubbles, then cured at 80°C for 40 minutes to obtain a PDMS film, and the PDMS with the required electrode shape (1mm×1mm) was cut off with a knife to obtain a groove corresponding to the electrode shape as an electrode template.

[0060] (2) Put the silicon wafer template on the hot stage, set the temperature of the hot stage to 60°C, then drop the silver nanowire solution into the template, heat and evaporate the solvent to obtain an electrode pattern with uniform distribution of silver wires; transfer the silicon wafer to room temperature On the table, remove the PDMS template prepared in the first step, drop the PDMS prepoly...

Embodiment 3

[0065] (1) According to the mass ratio of flexible polymer and curing agent of 10:1, mix and stir evenly to obtain PDMS prepolymer solution, vacuumize (vacuum degree -80kpa to -100kpa) for 10 minutes for degassing treatment, use glass rod to dip PDMS Prepolymer, coating a PDMS film with uniform thickness on the silicon wafer, vacuum treatment for 15 minutes to remove air bubbles, and then curing at 80°C for 40 minutes to obtain a PDMS film, and cut off the PDMS with the required electrode shape (1mm×2mm) with a knife to obtain The groove corresponding to the shape of the electrode is used as a template for making the electrode.

[0066] (2) Put the silicon wafer template on the hot stage, set the temperature of the hot stage to 70°C, then drop the silver nanowire solution into the template, heat and evaporate the solvent to obtain an electrode pattern with uniform distribution of silver wires; transfer the silicon wafer to room temperature On the table, remove the PDMS templat...

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Abstract

The invention relates to a flexible capacitive sensor fabricated by employing a silver nanowire flexible electrode. The flexible capacitive sensor comprises an upper-layer flexible electrode plate, alower-layer flexible electrode plate and an intermediate flexible dielectric layer, wherein each flexible electrode comprises a flexible substrate, a silver nanowire electrode thin film layer, and thesilver nanowire electrode thin film layer is arranged in the flexible substrate. A fabrication method of the electrode employs a transfer printing method, the silver nanowire electrode thin film layer is fabricated in an electrode template, a flexible polymer is injected for curing, so that the silver nanowire conductive thin film layer is transferred to the flexible substrate. The flexible dielectric layer is divided into two types comprising a thin film structure and a porous structure, the thin film structure is fabricated by uniformly coating a flexible polymer prepolymer on a silicon wafer to form a thin layer, the porous structure is fabricated by a template method, the flexible polymer prepolymer is uniformly mixed with salt, a film formation structure is fabricated and cured, andthe porous dielectric layer structure is obtained after salt removal. The flexible capacitive sensor is simple in fabrication method and has favorable signal response.

Description

technical field [0001] The invention belongs to the research field of capacitive sensors, in particular to a flexible capacitive sensor prepared by adopting silver nanowire flexible electrodes. Background technique [0002] As an important link in information technology, sensing technology is highly valued by various industries. As consumers have higher requirements for the comfort and universality of sensors, flexible design has become an important development direction of sensors. Flexible sensors can be used in a variety of human body wearable devices, which can accurately and continuously provide physiological signals of the human body, and can adapt to changes in human body movement patterns. Among many flexible sensors, flexible capacitive sensors have the advantages of simple structure, low cost, high reliability and strong anti-interference ability. At present, most flexible capacitive sensors are in the form of a sandwich structure, which consists of upper and low...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/14B82Y30/00B82Y35/00B82Y40/00
CPCB82Y30/00B82Y35/00B82Y40/00G01L1/142
Inventor 邵丽华宋维鹏
Owner BEIHANG UNIV
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