Forming method of waveguide and sf6 gas passive sensor comprising the waveguide

Abstract

The invention discloses a waveguide formation method and an SF6 gas passive sensor comprising the waveguide. The waveguide formation method comprises the following steps: growing an insulation layer on a silicon substrate; spin coating photoresist on the surface of the insulation layer; photoetching the photoresist and forming a waveguide structure; carrying out vapor deposition of glass in the waveguide structure to form a glass waveguide layer; removing the photoresist that is not photoetched and the glass outside the waveguide structure through the stripping technology to form a waveguide main body; spin coating a polymer on the waveguide main body; photoetching the polymer and carrying out curing to form cavity pillars; and processing the tops of the cavity pillars through the bondingtechnology to form cavities, wherein the multiple cavities are connected to form a waveguide. The waveguide formation method and the SF6 gas passive sensor comprising the waveguide, through passive design, increase product life, improve sensor sensitivity and have a real-time online monitoring function.

Description

technical field [0001] The invention relates to the fields of high-voltage equipment monitoring and sensing, in particular to a waveguide forming method. Background technique [0002] In the power industry, high-voltage switchgear accounts for more than 80% of SF6 gas consumption, and medium-voltage switchgear accounts for about 10%. In 2014, the total number of ring network cabinets reached 1.1993 million, of which SF6 gas ring network cabinets accounted for 64%, that is, the total number of SF6 gas ring network cabinets was 767,600; at present, there are 5182 new smart substations in China, with each Calculated by purchasing 2 sets of monitoring equipment at the site, smart substations that account for 10% of the total (500) replace new monitoring equipment each year, and the annual demand is 1,000 sets; SF6 gas monitoring also has a large market demand in cable trenches Taking Beijing as an example, there are more than 7,200 cable wells in Beijing, and the cable trench i...

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Problems solved by technology

[0003] The SF6 gas detection device based on the high-voltage discharge ionization method has a short service life, cannot work stably for a long time, has large drift, is prone to false alarms, and is not suitable for quantitative on-line detection; although the SF6 gas detection device based on the electrochemical method has good stability , but because the sensor participates in the reaction, secondary pollution may occur, and the sensor must be replaced regularly, which increases the investment in the later stage

Current studies have found that SF6 detection devices and equipment based on infrared absorption method have great advantages in performance, but the equipment is bulky and the detection cycle is long, which is not suitable for building a monitoring network and performing real-time detection

At the same time, traditional SF6 gas detection sensors are mostly active devices, and active devices will inevitably introduce device life and power supply problems

Although the existing handheld device solves the problem of excessive equipment size, there is a problem of battery power supply. Secondly, the gas detection of the device is passive detection, that is, it is only possible to detect gas leakage during human inspection, and real-time detection cannot be performed. online test

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