A multi-workpiece ion beam polishing system and method

Abstract

The invention discloses a multiple-workpiece ion beam polishing system and method. The multiple-workpiece ion beam polishing system comprises a vacuum chamber. A required ion source, a clamp and a movement mechanism are arranged in the vacuum chamber. The ion source generates an ion beam, the clamp is used for clamping workpieces, and the movement mechanism is used for conducting machining control. The multiple workpieces are clamped on the clamp at the same time. According to the multiple-workpiece ion beam polishing system and method, the multiple-workpiece clamp is adopted, the multiple workpieces are clamped at one time, and therefore the time, required by vacuum pumping and debugging of a single workpiece, of a machine is omitted, machining of the multiple surfaces can be conducted onthe multiple workpieces at the same time, the machining time and the machining cost are greatly saved, and the machining efficiency is greatly improved. According to the multiple-workpiece ion beam polishing method, the multiple-station clamp is arranged in the polishing system, the multiple workpieces can be simultaneously clamped to be machined at the same time, and therefore the production efficiency of the machine is further improved. In addition, the distances between the multiple workpieces are judged, an appropriate machining method is adopted, and therefore the purpose of polishing the workpieces on the same clamp at the same time can be achieved.

Description

technical field [0001] The invention relates to the technical field of ion beam polishing, in particular to a multi-workpiece ion beam polishing system and method. Background technique [0002] Ion beam refers to a group of ions that move in almost the same direction at approximately the same speed. The ion beam modification process uses ion beams to modify the shape of the workpiece. Borrowing ion beams for processing can improve processing accuracy and ensure product quality. The beam polishing process is one of the ion beam modification processes. [0003] At present, the ion beam modification processing equipment often adopts a single vacuum chamber design or a double vacuum chamber design. Similar to the general processing system, the ion beam processing system is equipped with a moving mechanism, an ion source and a workpiece fixture. [0004] However, the existing ion beam processing system adopts a vacuum structure, which is very troublesome to assemble and disassem...

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Problems solved by technology

[0004] However, the existing ion beam processing system adopts a vacuum structure, which is very troublesome to assemble and disassemble. The current ion beam processing system, whether it is a single vacuum chamber or a double vacuum chamber design, the clamping position of the tooling fixture is limited, and only one workpiece can be clamped at a time for processing, and the processing efficiency has not been effectively improved.

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