Terahertz photoconductive antenna array and detector thereof
A photoconductive antenna, terahertz technology, which is applied to the antenna arrays that are energized separately, the antenna arrays, and the use of electrical radiation detectors for photometry, etc., can solve the problems of difficult phase synchronization control and low utilization of terahertz pulse energy. Eliminate the reverse output current, increase the utilization rate, and improve the signal-to-noise ratio of the detection signal
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Embodiment 1
[0032] when using figure 1 In the terahertz photoconductive antenna array structure shown, the photoconductive antenna element 1 with an electrode gap g of 5 μm is selected, and the array element isolation technology is used to separate each photoconductive antenna element 1 in the array antenna to avoid adjacent elements A reverse detection current is generated between them to form an antenna array composed of M×N photoconductive antenna array elements 1 .
Embodiment 2
[0034] Such as figure 2 As shown, element spacing (L=300μm), electrode gap (g=5μm), inter-electrode width (w=30μm), antenna length (l=90μm), single photoconductive antenna element 1 is 300μm×300μm, support The substrate 3 is (100) radial semi-insulating GaAs prepared by liquid straightening method, its size is 3mm×3mm, and its resistivity is higher than 10 7 Ω·cm, the thickness is 0.6mm, and the absorption depth of femtosecond laser with a wavelength of 800nm is about 1μm. The total number of photoconductive antenna elements 1 is 8, so under the action of the detected terahertz pulse with a spot diameter of 3mm, about 8 photoconductive antenna elements are modulated by the terahertz pulse electric field, which is more convenient to use and detect Better performance.
[0035] The electrode shape is prepared on the support substrate 3 using conventional photolithography techniques, and then a mixture of Ni / Au-Ge / Au is deposited on the support substrate 3 by electron beam ev...
Embodiment 3
[0037] Such as Figure 4 As shown, any two photoconductive antenna elements in the terahertz photoconductive antenna array are randomly selected to form a 1×2 antenna array for coherent detection of terahertz waves. The figure shows the detection of each photoconductive antenna element and antenna array result. The experimental results show that the detection performance of the antenna array is greatly improved compared with that of a single photoconductive antenna element, and the signal-to-noise ratio is increased by 1.6 times.
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