Non-destructive cleaning process for optical glass for laser system

Abstract

The invention discloses a non-destructive cleaning process for ultra-smooth optical glass for a laser system. The cleaning process comprises the steps of weak acid soaking, pure water rinsing, defectdetection, organic washing agent cleaning, pure water rinsing, IPA dehydration, IPA slow pulling and drying, cleanliness detection and the like. Specifically, the cleaning process comprises the following steps of softening residues on the substrate surface by means of weak acid solvent soaking and ultrasonic cleaning; then rinsing the substrate surface with pure water; performing ultrasonic cleaning with organic solvent after pure water rinsing is completed, and removing residual acid washing agents on the surface; rinsing the surface with pure water again to remove residual organic solvent onthe surface; performing ultrasonic dehydration by using IPA after pure water rinsing is completed; removing IPA residues on the surface by using IPA high-temperature steam for drying finally, and realizing non-destructive cleaning on the ultra-smooth optical glass; and performing real-time detection by using an optical microscope after cleaning is completed to ensure the repetition consistency ofthe cleaning process.

Description

technical field [0001] The invention belongs to the field of ultrasonic cleaning technology, and in particular relates to a non-destructive cleaning technology for ultra-smooth optical lenses applied in a laser system. Background technique [0002] In the laser system, the optical lens is one of the core key components, and its anti-laser damage threshold directly determines the service life of the optical lens. The anti-laser damage threshold of optical lenses depends on many factors such as surface finish, substrate cleanliness, and film quality. After the optical lens is ultra-smooth and polished, there are still some organic, inorganic and metal ion pollution on the surface. Observation, use ultrasonic cleaning to remove the residue on the surface of the lens, and then observe the defects on the micro surface. In order to effectively remove residues on the surface of optical lenses, ultrasonic non-destructive cleaning has a significant effect on optical lens processing...

AI Technical Summary

Problems solved by technology

The manual wiping method has high requirements for cleaning workers, and has a certain bottleneck in mass production, and can only remove large particles at the micron level, and it is difficult to work on particles at the nanometer scale

[0004] Fully automatic ultrasonic cleaning is a widely used cleaning method for mass production and has continuous mass production capacity. However, it is mainly used for mass cleaning of ordinary glass. After cleaning, the quality is difficult to meet the ultra-smooth surface cleanliness requirements of optical lenses used in laser systems.

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