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Contour grinding and chamfering method of special-shaped CdZnTe wafer

A cadmium zinc telluride wafer and chamfering technology, which is applied in the direction of grinding machine tools, grinding slides, grinding racks, etc., can solve the problems of low production efficiency and long grinding process

Active Publication Date: 2021-04-20
西北电子装备技术研究所
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The invention provides a method for grinding and chamfering the contour of a special-shaped CdZnTe wafer, which solves the technical problems of long grinding process and low production efficiency existing in the grinding and chamfering process of the special-shaped CdZnTe wafer

Method used

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  • Contour grinding and chamfering method of special-shaped CdZnTe wafer
  • Contour grinding and chamfering method of special-shaped CdZnTe wafer
  • Contour grinding and chamfering method of special-shaped CdZnTe wafer

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Embodiment Construction

[0022] The present invention is described in detail below in conjunction with accompanying drawing:

[0023]A profile grinding and chamfering machine for special-shaped wafers, including an electric controller and an X-direction screw guide pair 1 fixedly arranged on a worktable, and a Y-direction mobile platform on the X-direction screw guide pair 1 is provided with a The lead screw guide pair 2 is connected with a direct drive motor on the Y-direction mobile platform 10 of the Y-direction lead screw guide pair 2, and the output shaft 11 of the direct drive motor protruding upward is connected with a rotary chuck 12, and the rotary chuck 12 A special-shaped chip is adsorbed on the top, and a grinding wheel mounting bracket 26 is arranged on the workbench at the rear side of the screw guide rail pair 1 in the X direction. The worktable on the front side of the guide rail pair 1 is provided with a visual recognition system 32, X-direction screw guide rail pair 1 drive motor, Y-...

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Abstract

The invention discloses a method for grinding and chamfering the contour of a special-shaped cadmium zinc telluride wafer. The technical problems of long grinding process and low production efficiency exist in the grinding and chamfering process of the special-shaped cadmium zinc telluride wafer. The present invention obtains the relationship between the feed rate and chipping length of the grinding CdZnTe wafer through a large number of process tests, thereby seeking an optimal solution. When grinding the outer ring, the feed rate is 1.5 mm each time, and the middle two Feed 0.8 mm each time when lapping, and feed 0.5 mm each time when grinding the innermost two laps, so that the number of laps can be reduced and the grinding efficiency can be improved; when lapping each lap, it can be analyzed by the visual system Processing, calculate which parts of the grinding wheel and the product can be in contact, which parts cannot be in contact, and control the rapid rotation of the grinding system in the places that cannot be in contact, and slow down in advance when they are about to reach the contact place, thus improving the grinding efficiency and ensuring the quality of the grinding.

Description

technical field [0001] The invention relates to a method for grinding and chamfering the outline of a special-shaped wafer, in particular to a method for grinding and chamfering the outline of a special-shaped CdZnTe wafer formed by cutting columnar crystals along the crystal direction. Background technique [0002] Cadmium zinc telluride (CdZnTe) crystal is an important functional crystal material. Due to its excellent performance, it is widely used in cutting-edge technology fields such as national defense and military industry, information, microelectronics and optoelectronics. Another use of CdZnTe crystal is as an infrared optical The epitaxial substrate for the growth of crystalline mercury cadmium telluride film; CdZnTe crystal has the characteristics of high brittleness and low hardness, which belongs to anisotropic soft and brittle functional crystal material; the production process of CdZnTe crystal is: first cultivate and grow columnar crystal in ingot furnace, Th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B1/00B24B37/00B24B37/005B24B37/27B24B37/34B24B41/02B24B47/12B24B49/12B24B51/00
CPCB24B1/00B24B37/00B24B37/005B24B37/27B24B37/34B24B41/02B24B47/12B24B49/12B24B51/00
Inventor 赵忠志肖方生马世杰岳军姜志艳范新丽任云星康冬妮
Owner 西北电子装备技术研究所