Low-foam glass substrate cleaning solution
A glass substrate and cleaning liquid technology, applied in the field of microelectronic materials, can solve problems such as poor cleaning performance, and achieve the effect of excellent wettability and cleaning performance
Inactive Publication Date: 2020-02-21
华璞微电子科技(宁波)有限公司
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- Abstract
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Problems solved by technology
Poor cleaning performance despite improved detergent foam
Method used
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[0019] The present invention will be further described below through specific examples, and the advantages of the present invention will be set forth, but the protection scope of the present invention is not limited only to the following examples.
[0020] 1. Specific examples
[0021] Examples The components and contents of the alkaline TFT-LCD glass substrate cleaning solution are shown in Table 1.
[0022] Table 1
[0023]
[0024]
[0025]
[0026] Note: wt% refers to mass percentage.
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The invention relates to a low-foam glass substrate cleaning solution, and belongs to the field of microelectronic materials. The low-foam glass substrate cleaning solution comprises the following components in percentage by weight: 1 to 45 percent (preferably 3 to 30 percent ) of strong alkali substance, 0.1 to 50 percent (preferably 0.5 to 20 percent ) of chelating agent, 0.1 to 15 percent (preferably 0.2 to 10 percent ) of defoaming agent, 30 to 99.3 percent (preferably 40 to 98 percent ) of deionized water, and 0.1 to 25 percent (preferably 0.2 to 20 percent ) of non-ionic surface active agent with a structure as shown in a formula I, wherein m is 1 to 3, R is H or CH3, and n is 2 to 50. The cleaning solution provided by the invention is non-toxic and non-corrosiveness, free of low-boiling-point organic volatile matters, non-pollute to the environment, and capable of effectively removing residues on the surface of a surface substrate without corroding a glass substrate at the sametime.
Description
technical field [0001] The invention relates to the field of microelectronic materials, in particular to a low-foaming alkaline glass substrate cleaning liquid composition in the glass substrate manufacturing process. The cleaning solution of the invention is non-toxic and non-corrosive, has no low-boiling point organic volatiles, has no pollution to the environment, and does not corrode the glass substrate while effectively removing surface residues on the surface substrate. Background technique [0002] As an important raw material for liquid crystal panels, the glass substrate is used for the front panel of the display, that is, for reading images from the outside, etc. The glass substrate in the liquid crystal display is divided into an upper substrate (color filter substrate) and a lower substrate (TFT array substrate), and a liquid crystal material is injected between the two glass substrates to realize liquid crystal display. Glass substrates account for about 20% of...
Claims
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IPC IPC(8): C11D1/72C11D3/30C11D3/33C11D3/20C11D3/04C11D3/08C11D3/37C11D3/60
CPCC11D1/72C11D3/044C11D3/046C11D3/08C11D3/2086C11D3/30C11D3/33C11D3/3707
Inventor 刘江华付元涛章小琴
Owner 华璞微电子科技(宁波)有限公司
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