Universal broadband photodetector design and fabrication process
A light detector and width technology, applied in general control systems, instruments, optics, etc., can solve the problem of reducing the dynamic range of optical fiber networks, increasing the production cost of aircraft avionics systems, and failing to meet the requirements of wide spectral range and high quantum efficiency, etc. problems, to achieve the effect of eliminating APP problems and reducing manufacturing costs
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[0089] Clause 1. A photodetector comprising:
[0090] Substrates made of doped germanium;
[0091] a mesa structure made of doped epitaxial germanium grown on top of a substrate, wherein the doped epitaxial germanium has a doping density less than that of doped germanium;
[0092] a metal film made of metal deposited on top of the mesa structure;
[0093] a metal pad made of metal deposited on top of the mesa structure and in contact with the membrane; and
[0094] An ohmic contact layer made of metal deposited on the bottom of the substrate.
[0095] Item 2. The photodetector according to Item 1, wherein the metal film and the metal pad are made of a metal selected from gold, silver, aluminum, copper, and indium.
[0096] Clause 3. The photodetector of Clause 2, wherein the metal film and the mesa structure form a junction having a Schottky barrier height in the range of 0.54 to 0.64 volts.
[0097] Clause 4. The photodetector of Clause 1, further comprising a voltage sou...
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