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Wide dynamic vacuum leak detection device

A wide dynamic and vacuum technology, applied in measuring devices, using liquid/vacuum degree for liquid tightness measurement, detecting the appearance of fluid at the leak point, etc., can solve the problem of single tracer gas and small dynamic range of vacuum leak detection environment , Can not cover the leak detection environment and other issues at the same time, to achieve the effect of high sensitivity, improved stability and reliability, and low power consumption

Pending Publication Date: 2020-03-20
718TH RES INST OF CHINA SHIPBUILDING INDAL CORP
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Problems solved by technology

However, the vacuum leak detection environment they are used in has a small dynamic range and a single tracer gas, which cannot cover medium vacuum, high vacuum, and ultra-high vacuum leak detection environments at the same time

Method used

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  • Wide dynamic vacuum leak detection device
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Embodiment 1

[0027] Wide dynamic vacuum leak detection device includes vacuum gauge, tracer gas source, ion source sampling unit, QMS unit, vacuum chamber and high-precision control loop;

[0028] The vacuum parts to be tested select standard leaks (metal squashed leaks 5×10 -5 Pa L / s);

[0029] The tracer gas in the tracer gas source is carbon tetrachloride;

[0030] The ion source sampling unit includes an ionization chamber 2, an anode 3, a filament 7, a magnet 1 and an ion beam lens electrode 5; the ionization chamber 2 is processed with a sample inlet 4 and an ion outlet 8, and the inner wall of the ionization chamber 2 has a layer of titanium oxide Cladding layer, the anode 3 passes through the ionization chamber 2 and is fixedly installed on the upper end of the ionization chamber 2, the filament 7 is located inside the ionization chamber 2, the magnet 1 is placed outside the ionization chamber 2, and the four ion beam lens electrodes 5 are installed in order of up and down The io...

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Abstract

The invention relates to a wide dynamic vacuum leak detection device, and belongs to the technical field of vacuum leak detection. According to the leakage detection device, a QMS and anode ignition technology linkage mode is adopted, vacuum leakage detection in the dynamic range of 10<2> Pa to 10<-9> Pa can be achieved under the cooperation of a high-precision control loop, and the technical blank of wide-dynamic-range vacuum leakage detection in the current market is filled up; and the tracer gas of the leak detection device is not limited to helium, so that the leak detection device has a wide application prospect.

Description

technical field [0001] The invention relates to a wide dynamic vacuum leak detection device, which belongs to the technical field of vacuum leak detection. Background technique [0002] The existing vacuum leak detection technology widely adopts helium mass spectrometry leak detection or residual gas analysis technology for leak detection. Both of the above techniques utilize the principle that the detector responds to changes in the tracer gas to reflect changes in the vacuum leak rate. However, the dynamic range of the vacuum leak detection environment they are used in is small, and the tracer gas is single, which cannot cover the leak detection environments of medium vacuum, high vacuum and ultra-high vacuum at the same time. Among them, referring to the standard GB / T3163-93, the vacuum area is roughly divided as follows: low vacuum 10 5 Pa~10 2 Pa, medium vacuum 10 2 Pa~10 -1 P, high vacuum 10 -1 Pa~10 -5 Pa, ultra-high vacuum <10 -5 Pa. Contents of the inve...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M3/20
CPCG01M3/20G01M3/202G01M3/205
Inventor 严奉轩王文锦李芳路晓川龙希伟赵巍仑赵加鹏孙喜堂凌大鹏陈宁韩京
Owner 718TH RES INST OF CHINA SHIPBUILDING INDAL CORP
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