High-sensitivity temperature measurement method based on near-infrared fluorescence of different rare earth ions

Abstract

The invention discloses a high-sensitivity temperature measurement method based on near-infrared fluorescence of different rare earth ions. Near-infrared light of Nd < 3 + > ions near 710 nm to 920 nmand near Er < 3 + > ions near 1400 nm to 1700 nm at different temperatures is measured, the fluorescence intensities of the two wave bands are compared, and then the function relation between FIR andthe temperature is obtained. And when the sample wafer is placed in an environment to be measured, the fluorescence intensity ratio is calculated, and the temperature of the environment to be measured is calculated by utilizing the function relationship. The two temperature measuring light bands are from the non-thermal coupling energy level, no overlapping exists, and data processing is facilitated. Meanwhile, the infrared light of Er < 3 + > belongs to a down-conversion process, the quantum yield is high, the pumping power of the required laser is small, and higher fluorescence intensity can be obtained. Meanwhile, the change trends of the intensities of the two fluorescence along with the temperature are opposite, and compared with the result that the intensities of the two fluorescence bands used in the prior art are the same or close to each other along with the temperature change trend, the temperature measurement sensitivity is higher.

Description

technical field [0001] The invention relates to the field of rare earth element fluorescence temperature measurement, and specifically adopts a rare earth element near-infrared fluorescence intensity ratio method for temperature measurement. Background technique [0002] As one of the important parameters of thermodynamics, temperature not only occupies an important position in academic research, but also plays a vital role in industrial manufacturing, medical medicine and other aspects. Therefore, rapidity and accuracy have gradually become important technical indicators for measuring temperature measurement technology. At present, the temperature measurement methods are mainly divided into contact temperature measurement and non-contact temperature measurement. Contact temperature sensors represented by thermocouples and thermal resistances are limited by their temperature measurement methods. In the process of heat transfer to the sensor, the inevitable heat loss increas...

AI Technical Summary

Problems solved by technology

[0004] Usually the fluorescence intensity ratio thermometry method uses Er 3+ Ionic 2 h 11 / 2 and 4 S 3 / 2 The fluorescence intensity ratio of the two energy levels is used to measure the temperature. Since the two fluorescent bands partially overlap, the division of the two fluorescent bands becomes difficult.

Therefore, the signal processing is difficult and the measurement error is large

At the same time, the low luminous efficiency of up-conversion fluorescence thermometry further limits the development of fluorescence thermometry technology.

Therefore, it is a good idea to use the down-conversion fluorescence temperature measurement with two fluorescence bands that do not overlap.

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