Pressure sensor based on asymmetric period surface plasmon lattice resonance

Abstract

The invention relates to a pressure sensor based on asymmetric period surface plasmon lattice resonance. The sensor comprises a lower-layer PDMS substrate and a nano-structure unit array located abovethe upper-layer PDMS substrate, and each nano-structure unit is formed by closely stacking a top metal ridge, a middle dielectric layer and a bottom metal ridge which are sequentially arranged from top to bottom. In a plane parallel to the lower PDMS substrate, the array period parameter Lx of the nano structure unit in the x direction and the array period parameter Ly of the nano structure unitin the y direction are different from each other. And the external pressure acts on the lower PDMS substrate, so that the change of the surface plasmon resonance wavelength is caused, and a pressure signal is converted into an optical signal for detection. The optical device structure provided by the invention has a very high quality factor, can realize accurate detection of micro deformation pressure, has less limitation on the structure size, and has a wider sensing application range.

Description

Technical field [0001] The invention belongs to the field of integrated optics technology and pressure sensing technology, and in particular relates to a pressure sensor device based on asymmetric periodic surface plasmon lattice resonance. Background technique [0002] Localized Surface Plasmon Resonances (LSPRs) supported by a single metal nanostructure have been widely used in technical fields such as spectroscopy and sensing due to their localized electromagnetic field enhancement in the deep subwavelength volume. . However, LSPRs also have problems such as low quality factor and limited local field enhancement. It is urgent to find surface plasmon lattice resonance with lower radiation loss, higher quality factor, and stronger local field to meet the application. At present, the technical demand side puts forward higher and higher requirements for the performance of the sensor. The miniaturization, high integration, and high quality factor of sensors have become important ...

AI Technical Summary

Problems solved by technology

[0004] 1. The device structure is implemented in a non-uniform medium environment and a symmetrical periodic array distribution. There are strict requirements for the period of the nano-column array structure of the device to be equal in the x-direction and y-direction. Therefore, it can only be used for devices with equal pressure in the x and y directions. Pressure measurement in a uniform environment cannot measure a single pressure in the x-direction or y-direction, and the deformation of the base of this scheme is small when it is under pressure, which limits its change period and cannot support lateral pressure measurement, which limits its Application range

[0005] 2. The quality factor of the device structure at normal incidence still cannot meet the high-resolution requirements of micro-pressure changes rapidly in a small range under a specific non-uniform medium environment

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