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Method for preparing anti-corrosion pure Ti film through DC magnetron sputtering

A DC magnetron sputtering and DC sputtering technology, which is applied in sputtering coating, ion implantation coating, metal material coating process, etc., can solve the problems of easy aging of protective paint, large environmental pollution, high maintenance cost, etc. Achieve good corrosion resistance, no environmental pollution, process controllable effect

Inactive Publication Date: 2020-04-03
725TH RES INST OF CHINA SHIPBUILDING INDAL CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

During the construction process, the primer and surface paint need to be coated separately, the construction period is long, the environmental pollution is large, and the protective paint is easy to age and fall off in a corrosive environment, and the maintenance cost is high

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] Using stainless steel as a substrate, the preparation of a corrosion-resistant pure titanium film on its surface by DC magnetron sputtering includes the following steps:

[0033] (1) Surface treatment of base material

[0034] A. Use acetone to wipe the surface of the substrate to remove surface oil;

[0035] B. Put the wiped substrate into ultrasonic cleaning equipment added with analytical pure alcohol and deionized water, and use ultrasonic cleaning to clean the substrate, wherein the volume ratio of analytical pure alcohol to deionized water is 1:9, the water temperature is 37°C, and the working frequency 29KHZ, cleaning time 0.5h;

[0036] C. Put the substrate into the ultrasonic cleaning equipment filled with deionized water again to remove the stains attached to the surface of the substrate. The water temperature is 51°C, the working frequency is 34KHZ, and the cleaning time is 0.5h;

[0037] D. After the substrate is cleaned, put it into the dryer to dry the s...

Embodiment 2

[0050] Using ordinary steel material as the substrate, the preparation of corrosion-resistant pure titanium film on its surface by DC magnetron sputtering includes the following steps:

[0051] (1) Surface treatment of base material

[0052] A. Use acetone to wipe the surface of the substrate to remove surface oil;

[0053] B. Put the wiped substrate into the ultrasonic cleaning equipment added with analytical pure alcohol and deionized water, and use ultrasonic cleaning to clean the substrate, wherein the volume ratio of analytical pure alcohol to deionized water is 1:9, the water temperature is 40°C, and the working frequency 25KHZ, cleaning time 0.5h;

[0054] C. Put the substrate into the ultrasonic cleaning equipment filled with deionized water again, the water temperature is 55°C, the working frequency is 35KHZ, and the cleaning time is 0.5h;

[0055] D. After the substrate is cleaned, put it into the dryer to dry the surface moisture.

[0056] (2) The substrate is pl...

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PUM

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Abstract

The invention discloses a method for preparing an anti-corrosion pure Ti film through DC magnetron sputtering. The method comprises the steps such as substrate surface processing, placement of a coating chamber on a substrate, substrate surface cleaning with reverse sedimentation, sputtering coating and production of a finished product after removal of a coated substrate. The method has the beneficial effects that rational technologies of surface processing, tooling fixation and sputtering coating can be adopted aiming at products such as valves and reaction kettles; the pure Ti film can be loaded on surfaces of the products, so the products can satisfy requirements for quality and corrosion prevention; technological processes are simple and efficient; courses are controllable; no environmental pollution is generated; and industrial production can be realized easily.

Description

technical field [0001] The invention relates to the technical field of preparation of functional thin film materials, in particular to a method for preparing corrosion-resistant pure titanium thin films by DC magnetron sputtering. Background technique [0002] Titanium and titanium alloys have excellent properties such as good corrosion resistance and high specific strength, and are especially immune to erosion by salt, acid, alkali or seawater and marine atmospheric environments, and are high-quality corrosion-resistant materials. With the rapid development of shipbuilding, marine engineering, and chemical industries, products with special performance requirements such as valves and reactors are gradually being replaced by titanium and titanium alloys with better corrosion resistance from the original steel materials and stainless steel. However, titanium and titanium alloys are difficult-to-process materials and are expensive. The present invention provides a method for pr...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/16
CPCC23C14/165C23C14/35
Inventor 吴晓飞杨学东蒋鹏
Owner 725TH RES INST OF CHINA SHIPBUILDING INDAL CORP
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