Method and system for transferring large number of MicroLED chips

A chip and a huge amount of technology, which is applied in the field of mass transfer of MicroLED chips, can solve the problems of MicroLED chips that cannot guarantee accurate positioning and are difficult to control, and achieve the effects of batch processing, easy control, and strong feasibility
CN110993636AInactive Publication Date: 2020-04-10FOSHAN NATIONSTAR SEMICON
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
FOSHAN NATIONSTAR SEMICON
Publication Date
2020-04-10
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a method for transferring a large number of MicroLED chips. The method comprises the following steps: providing a substrate, arranging a first metal layer on the surface of thesubstrate,wherein passivated metal is selected as the first metal layer, and the resistivity of the passivated metal is less than or equal to 110 n[Omega].m; arranging a second metal layer on the bottom surface of a MicroLED chip, wherein the second metal layer is made of second metal, and the second metal can adsorb anions after being irradiated by the UV light source; cleaning surface ions ofthe first metal layer through a plasma cleaning machine to enable the first metal layer to carry positive ions; irradiating the second metal layer of the MicroLED chip with ultraviolet light to enablethe second metal layer to carry negative ions; and putting the substrate and the MicroLED chip in non-conductive liquid, and the transferring the MicroLED chip to the substrate through electric ion adsorption. By the adoption of the method for transferring the large number of MicroLED chips, large-scale transfer is achieved, operation is easy, efficiency is high, and positioning is accurate.
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Description

technical field

[0001] The present invention relates to the technical field of MicroLED chips, in particular to a method and system for mass transfer of MicroLED chips. Background technique

[0002] MicroLEDs are brighter and more efficient than existing OLED technology, but consume less power. The excellent characteristics of Micro LED will make it suitable for TV, iPhone and iPad.

[0003] The display principle of MicroLED Display is to make the LED structure design into thin film, miniaturization, and array. The transparent and opaque substrates; and then use the physical deposition process to complete the protective layer and the upper electrode, and then the upper substrate can be packaged to complete the Micro LED display with a simple structure.

[0004] Batch transfer refers to uniformly soldering three to five hundred, or even more red, green and blue primary color LED tiny grains on a TFT circuit substrate the size of a fingernail, in accordance with the necessar...

Claims

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