Miniaturized high-sensitivity piezoelectric microphone

A high-sensitivity, piezoelectric technology, applied to piezoelectric/electrostrictive transducers, microphones, electrical components, sensors, etc., can solve the problems of reducing and reducing the sensitivity of microphones, so as to reduce the device area and facilitate signal acquisition , the effect of reducing the size

Inactive Publication Date: 2020-04-21
武汉敏声新技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The technical problem solved by the present invention is to provide a miniaturized high-sensitivity piezoelectric microphone to solve the problem that

Method used

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  • Miniaturized high-sensitivity piezoelectric microphone
  • Miniaturized high-sensitivity piezoelectric microphone

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Experimental program
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Effect test

Embodiment 1

[0028] This embodiment discloses a structure of a miniaturized high-sensitivity piezoelectric microphone, such as figure 1 As shown, it includes an SOI wafer substrate 2 with a back cavity and a piezoelectric cantilever beam 6 fixed on the SOI wafer substrate 2. The piezoelectric cantilever beam 6 includes a fixed end fixedly connected with the SOI wafer substrate 2 and The free end connected to the fixed end and suspended above the back cavity is provided with a mass block 204 below the free end, and the resonant frequency of the device is reduced by adjusting the parameters of the mass block 204, thereby improving the sensitivity of the piezoelectric microphone. Usually, the substrate of the piezoelectric microphone can be selected from a variety of substrates, such as SOI, Si, and sapphire substrates, which are suitable for microphones with various structures, and the type of substrate can be determined according to the structure of the beam. The parameters of the adjusted ...

Embodiment 2

[0033] This embodiment discloses a piezoelectric microphone with four trapezoidal valves. Such as figure 2 As shown, there are multiple piezoelectric cantilever beams 6 , and there is a gap 206 of a certain width between adjacent piezoelectric cantilever beams 6 . Preferably, the shape of the piezoelectric cantilever beam 6 is fan-shaped, trapezoidal or triangular. The shape of the piezoelectric cantilever beam 6 in this embodiment is trapezoidal. Four trapezoidal piezoelectric cantilever beams 6 form the receiving sound pressure area 11, and the receiving sound pressure area can be be circles, triangles, squares or other polygons. The smaller end 9 of each piezoelectric cantilever 6 is fixedly connected to the substrate, and the other end is used as a free end, and each free end is provided with a mass block 204; of course, the larger end 10 can also be selected to be fixedly connected to the substrate. , and the other end as a free end.

[0034] The substrate of this exa...

Embodiment 3

[0039] refer to Figure 5 , four microphones of reduced size are connected in series, equal to the area of ​​the prior art microphone, and the quality block 204 at the free end of the cantilever beam 6 has the effect of reducing the resonant frequency and improving the output voltage in the working range (20Hz~20kHz) to the device, by optimizing The quality block 204 makes the output performance of a single reduced-sized microphone consistent with that of the original large-area microphone. The four microphones are connected in series, and after the electrical signals generated by the four devices are superimposed on each other, the first signal terminal 404 and the second signal Terminal 405 can effectively enhance the microphone voltage sensitivity.

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Abstract

The invention discloses a miniaturized high-sensitivity piezoelectric microphone, and belongs to the field of MEMS piezoelectric devices. The piezoelectric microphone provided by the invention comprises a substrate with a back cavity and a piezoelectric cantilever beam fixed on the substrate, the piezoelectric cantilever beam comprises a fixed end fixedly connected with the substrate and a free end connected with the fixed end and suspended above the back cavity, the free end is provided with a mass block for reducing the resonant frequency of the piezoelectric cantilever beam, and the resonant frequency of the device is reduced to a proper range by adjusting the parameters of the mass block. By arranging the mass block at the free end of the cantilever beam, the resonant frequency of thedevice can be effectively reduced, the output voltage is improved, and the sensitivity of the microphone is maintained when the area of the microphone is reduced. Meanwhile, an electric signal is ledout from the fixed frame through a piezoelectric lamination layer for connecting the cantilever beam and the fixed frame; furthermore, a plurality of microphones are arrayed, output electric signals can be remarkably enhanced through series connection, and output impedance of microphone components can be reduced through parallel connection.

Description

technical field [0001] The invention relates to the field of MEMS piezoelectric devices, in particular to a miniaturized high-sensitivity piezoelectric microphone. Background technique [0002] A microphone is a device that converts sound signals into electrical signals, and is widely used in devices such as microphones, mobile phones, PCs, and vehicle-mounted voice recognition. After long-term development, the current performance indicators of the microphone are more focused on intelligence, digitization and miniaturization. Nowadays, MEMS microphone technology is more and more closely integrated with aerospace, biomedicine, consumer electronics, information communication, and military industries, and there are higher requirements for the reliability and sensitivity of microphones. [0003] The frequency range of human perception of sound is 20Hz~20kHz, so the operating frequency range of piezoelectric microphones in consumer electronics is 20Hz~20KHz, and the resonance fr...

Claims

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Application Information

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IPC IPC(8): H04R17/02
CPCH04R17/02H04R2201/003
Inventor 孙成亮胡博豪吴志鹏林炳辉王磊朱伟占惠花
Owner 武汉敏声新技术有限公司
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