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Compact time shaping system

A compact and time-saving technology, applied in the direction of optical components, optics, instruments, etc., can solve the problem of large space size, and achieve the effect of easy installation and adjustment, easy engineering realization, and reduced space size

Active Publication Date: 2020-04-24
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0005] In order to solve the technical problem that the space size of the existing femtosecond laser pulse time shaper based on the principle of optical path difference is too large when a longer time delay is required, the present invention provides a compact time shaper system

Method used

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Embodiment Construction

[0038] The present invention will be further described below in conjunction with accompanying drawing.

[0039] Such as figure 2 As shown, the compact time shaping system provided by this embodiment realizes time shaping based on the principle of optical path difference, and mainly includes beam splitting and combining mirror 201 (which is coated with a semi-transparent and semi-reflective film), reflector 202, SLM 203, the first liquid crystal 204, the second liquid crystal 205, and the optical error compensation module 206; the laser pulse sequence output by the femtosecond laser enters the light splitting and beam combining mirror 201 with a splitting ratio of 1:1 (in other embodiments, it can be determined according to actual conditions) It is required to design the splitting ratio to be other values), which are divided into sub-pulse 1 (reflected light) and sub-pulse 2 (transmitted light) with equal energy; the first liquid crystal 204, optical error compensation module ...

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Abstract

In order to solve the technical problem that the existing femtosecond laser pulse time shaper based on the optical path difference principle is too large in space size when longer time delay needs tobe generated, the invention provides a compact time shaping system which comprises a beam splitting and combining mirror, a reflecting mirror and an SLM. Incident laser is divided into two paths afterpassing through the beam splitting and combining mirror, wherein the reflector is arranged on one path, and the SLM is arranged on the other path. The full-system phase diagram of the SLM is determined according to the time delay required to be generated by the time shaping system. The SLM is adopted to generate the optical path difference, and the space size of the time shaping system is reduced.

Description

technical field [0001] The invention relates to the technical field of femtosecond laser pulse shaping, in particular to a compact time shaping system. Background technique [0002] In industries as diverse as silicon processing, integrated circuit (IC) back-end processing, microelectronics packaging, and solar manufacturing, processing of brittle materials faces serious challenges as wafer thicknesses continue to shrink, and the accuracy of their fabrication (reticle Width), quality (edge ​​collapse, roughness, etc.) have put forward higher requirements, which gave birth to the femtosecond laser pulse shaping technology. Time shaping is to shape a laser pulse into several sub-pulses, and the time delay between sub-pulses, the number of sub-pulses, and the energy of sub-pulses can be shaped according to actual needs. The time-shaped femtosecond laser pulse can more flexibly and profoundly affect the process of material phase transition, so it provides greater convenience fo...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B27/09
CPCG02B27/0905G02B27/0938
Inventor 李珣李明刘红军谭羽
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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