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Efficient graphene roll-to-roll continuous growth equipment and preparation method

A graphene roll, graphene technology, applied in graphene, gaseous chemical plating, coating and other directions, can solve the problems of high power consumption, low production efficiency, etc., to improve production efficiency, good consistency, independent of size The effect of restriction

Pending Publication Date: 2020-04-28
GRAHOPE NEW MATERIALS TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved in this disclosure is that the production efficiency of existing graphene roll-to-roll continuous growth CVD equipment is still low, and the power consumption is also high

Method used

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  • Efficient graphene roll-to-roll continuous growth equipment and preparation method
  • Efficient graphene roll-to-roll continuous growth equipment and preparation method
  • Efficient graphene roll-to-roll continuous growth equipment and preparation method

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preparation example Construction

[0047] The disclosure also provides a method for preparing graphene: placing a plurality of metal substrates on a plurality of driven rollers in the feeding cabin, pulling the metal substrates into the receiving cabin and winding them on the driving roller; The cabin is evacuated, and then an inert gas is introduced from the air inlet at one end of the feed cabin; the heating device is turned on to heat the graphene growth area, so that the graphene growth area rises to the growth temperature of graphene; The air inlet is fed with carbon source gas; the motor is turned on to make the driving roller start to rotate and drive the metal substrate to run, and graphene is deposited on the metal substrate passing through the graphene growth zone. After the growth is completed, close the incoming reaction gas, heating device and motor, and after the temperature drops to room temperature, close the inert gas, open the breaker valve, and take out the metal substrate with graphene grown....

Embodiment 1

[0054] Such as figure 1 As shown, the high-efficiency graphene roll-to-roll continuous growth equipment of the present embodiment is a horizontal equipment, including a cabinet 1, and the cabinet 1 is provided with a workbench 2, and the two ends of the workbench 2 are respectively provided with a feed cabin 3 and a receiving chamber. Material cabin 4, feeding cabin 3 and material receiving cabin 4 are connected through quartz tube 10, feeding cabin 3 is equipped with two driven rollers 8, and material receiving cabin 4 is equipped with two driving rollers 9, two driving rollers 9 Connected to two motors respectively. There are air supply system, radio frequency power supply, control cabinet and vacuum unit in the cabinet 1, an air inlet 5 is provided at one end of the feeding cabin 3, and an air inlet 6 and a vacuum breaking valve 7 are arranged at one end of the receiving cabin 4, and the air outlet 6 is connected Vacuum unit. A plasma generator 13, a heating furnace 12 an...

Embodiment 2

[0057] Such as image 3 As shown, the high-efficiency graphene roll-to-roll continuous growth equipment in this embodiment is a vertical equipment, including a cabinet 1 and a workbench 2. The main difference between the vertical equipment and the horizontal equipment in Embodiment 1 is that the installation methods of each component are different. , One side of the workbench 2 is sequentially installed with a feeding cabin 3, a quartz tube 10 and a receiving cabin 4 from bottom to top. A plasma generator 13 is arranged upstream of the quartz tube 10 , a heating furnace 12 is arranged midstream, and a blower fan (not shown in the figure) and a touch screen 14 are arranged downstream. Set inside the quartz tube 10 figure 2 In the quartz frame shown, the flat surface (isolation support plate 11) of the quartz frame is provided with an array of hollow holes.

[0058] The vertical growth equipment occupies a small area of ​​the site, and the vertical growth equipment is used to...

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Abstract

The invention discloses efficient graphene roll-to-roll continuous growth equipment and a preparation method. The graphene roll-to-roll continuous growth equipment comprises a feeding cabin (3), a growth cabin and a receiving cabin (4), wherein the feeding cabin (3) is provided with more than two driven rollers (8), the receiving cabin (4) is provided with more than two driving rollers (9), an isolation support plate (11) is arranged in the growth cabin, the isolation support plate (11) divides the growth cabin into more than two growth chambers, the growth cabin comprises a graphene growth area, and the graphene growth area is provided with a heating device. The graphene preparation method provided by the invention comprises a step of simultaneously placing a plurality of metal substrateson a plurality of driven rollers (8) and a driving roller (9), and a step of setting the driving roller to be the same or different. The equipment and the method disclosed by the invention have the advantages of high quality, good consistency, no size limitation and the like of graphene prepared by the existing equipment, the production efficiency of graphene is further improved, and the energy consumption for preparing graphene per unit area is reduced.

Description

technical field [0001] The disclosure relates to graphene growth equipment and technology, in particular to a high-efficiency roll-to-roll continuous growth equipment and preparation method of graphene. Background technique [0002] The chemical vapor deposition (CVD) method refers to the method in which chemical gases or vapors react on the surface of the substrate to synthesize coatings or nanomaterials. The preparation of graphene by CVD method is to use carbon-containing organic gas to vapor-deposit graphene film on the surface of transition metal in a high-temperature CVD furnace. [0003] Graphene can be grown using a discontinuous CVD tube furnace. The discontinuous CVD tube furnace has a relatively simple structure and is easy to operate. However, the growth time of graphene in a single furnace is long and consumes a lot of power. Due to the limitation of the diameter of the quartz tube and the length of the growth temperature zone, it is impossible to prepare larg...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B32/186C23C16/26C23C16/54C23C16/50
CPCC01B32/186C23C16/26C23C16/545C23C16/50
Inventor 吴海林张谦袁凯杰沈刘帮
Owner GRAHOPE NEW MATERIALS TECH INC
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