Automatic precise electrochemistry etching method and automatic precise electrochemistry etching equipment

Abstract

The invention discloses an automatic precise electrochemistry etching method. Precise etching process control is achieved mainly through parameter setting, automatic workpiece positioning, initial value collecting, etching current acting amount calculating, initial value adjusting and other steps, and accordingly precise etching is conducted on a to-be-treated workpiece. According to the automaticprecise electrochemistry etching method, through comparison of a pre-calculated current acting amount and a current actual acting amount in an actual etching process, the closed-loop control processof precise etching is conducted, and accordingly accurate control over electrochemistry etching is achieved, wherein a VCO conversion method is adopted for accurately obtaining the etching current actual acting amount in the etching process, and accordingly accurate control is conducted on the thinning amount of the workpiece. In addition, the invention further relates to automatic precise electrochemistry etching equipment implementing the automatic precise electrochemistry etching method. By means of the automatic precise electrochemistry etching method and the automatic precise electrochemistry etching equipment, the electrochemistry etching precision, electrochemistry etching process control stability and etching efficiency are greatly improved, and the etching cost is greatly reduced.

Description

technical field [0001] The present invention relates to an automatic precision electrochemical etching method, in which, the actual work amount of the etching current during the etching process is accurately obtained by using the VCO conversion method, so as to accurately control the thinning amount of the workpiece; in addition, the present invention also relates to a An automatic precise electrochemical etching device realizing the automatic precise electrochemical etching method. Background technique [0002] With the development of electronic technology, the requirements for the accuracy of electronic workpieces are getting higher and higher, so it is necessary to further adjust the initial value of the output performance of electronic workpieces during the production process, so as to control the output characteristics of the workpieces and achieve the required functions, such as resistance strain gauges. Resistance strain gauges (hereinafter referred to as strain gaug...

AI Technical Summary

Problems solved by technology

[0006] In order to overcome the problems of low resistance adjustment efficiency, high labor intensity, human factors in the processing process that have a great impact on the quality of the processed workpiece during the adjustment of the output characteristics of the electronic workpiece by the above-mentioned processing method, and the current electrochemical corrosion method is difficult to control The shortcoming of corrosion precision, the present invention provides a kind of automatic precision electrochemical etching method, mainly comprises the following steps:

Images