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Rotary microchannel plate etching device and etching method

A technology of microchannel plate and corrosion device, which is applied to electrode devices of multiple dynodes, dynodes, discharge tubes, etc., can solve the problems of poor quality and low corrosion efficiency of microchannel plates, and achieves the promotion of pore formation, The effect of improving corrosion efficiency and surface quality

Active Publication Date: 2022-07-08
NORTH NIGHT VISION TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to overcome the deficiencies in the existing microchannel plate etching methods and equipment, the invention provides a rotary microchannel plate etching device, which is used to solve the technical problems of low corrosion efficiency and poor quality of the current microchannel plate

Method used

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  • Rotary microchannel plate etching device and etching method
  • Rotary microchannel plate etching device and etching method
  • Rotary microchannel plate etching device and etching method

Examples

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Effect test

Embodiment 2

[0094] Example 2: Corrosion process of BJ type microchannel plate

[0095] Fill the corrosion tank with a nitric acid solution with a concentration of 1 equivalent, place the microchannel plate to be etched in a rotary corrosion device, immerse it under the liquid surface, and start rotary corrosion at a speed of 60 minutes / r for 30 minute.

[0096] After 30 minutes, the rotating device was stopped, the liquid level in the corrosion tank was drained to just below the microchannel plate, and then filled with 1 equivalent of nitric acid, and the next rotary corrosion was started after repeated two times, and the time was 30 minutes.

[0097] After 30 minutes, the rotating device was stopped, the liquid level in the corrosion tank was drained to just below the microchannel plate, and then filled with 1 equivalent of nitric acid, and the next rotary corrosion was started after repeated two times, and the time was 30 minutes.

[0098] After 20 minutes, the rotating device was stoppe...

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Abstract

The invention provides a rotary microchannel plate corrosion device and corrosion method, comprising: an electric motor; a hydraulic transmission assembly with a hydraulic transmission shaft; a tray for placing a corrosion fixture, which is connected with the hydraulic transmission component; The corrosion tank on the tray; the liquid supply and drainage system; and the ultrasonic device for cleaning the micro-channel plate; the torque output by the motor is applied to the tray through the hydraulic transmission assembly, which can drive the tray to rotate in the circumferential direction, and the hydraulic transmission assembly is adjustable. The lifting hydraulic transmission assembly, under its drive, makes the tray go up and down to enter and leave the corrosion tank; the hydraulic connecting rod assembly places the corrosion tray and the motor on the upper and lower sides of the corrosion liquid level. During the corrosion process, the liquid in the corrosion tank is completely The quartz corrosion fixture is not passed, and the microchannel plate is rapidly corroded by the rotation of the tray itself.

Description

technical field [0001] The invention relates to the technical field of preparation of microchannel plates, in particular to a rotary microchannel plate etching device and an etching method. Background technique [0002] Microchannel plate is a special optical fiber device, which is an advanced electron multiplier with functions of transmitting and enhancing electronic images. It has the advantages of small size, light weight, good resolution, high gain, low noise, and low operating voltage. , it uses its secondary electron emission characteristics to multiply the electrons colliding on the inner wall (channel) at high speed, making it more than ten thousand times the electron flow. Taking advantage of this characteristic, microchannel plates are currently widely used in photomultiplier tubes, image intensifiers, low-light TVs, X-ray image intensifiers, high-speed oscilloscope tubes, as well as photon counting, X-rays, ultraviolet photons, electrons, ions, charged Particles,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J9/02H01J43/24
CPCH01J43/246H01J9/02
Inventor 李婧雯孙建宁张欢邱祥彪张正君丛晓庆牛鹏杰孙赛林高鹏郭一亮
Owner NORTH NIGHT VISION TECH
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