On-chip planar micro ionization vacuum sensor and manufacturing method
A technology for vacuum sensors and manufacturing methods, applied to vacuum gauges using ionization effects, etc., can solve problems such as narrow range, large mass, and outgassing, so as to reduce outgassing, reduce energy consumption and heat production, reduce volume and quality effect
Active Publication Date: 2020-05-12
北京大学(天津滨海)新一代信息技术研究院
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Problems solved by technology
This ionization vacuum sensor has problems such as large volume, large mass, high energy consumption, heat generation by the filament, and serious outgassing, especially the expansion of the hot filament, which limits the further reduction of the distance between the electron source of the hot filament and the electron accelerator. At the same time, the filament is very easy to oxidize and fail under high pressure. These two factors limit the measurement range of the current ionization vacuum sensor.
On the other hand, the measurement range of the currently used ionization vacuum sensor is narrow, and different vacuum sensors are required to measure different vacuum degrees, which greatly limits the application of ionization vacuum sensors
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[0055] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.
[0056] In the first aspect, according to the embodiment of the present application, an on-chip planar miniature ionization vacuum sensor is proposed, such as figure 1 As shown, including: an electron source and a plurality of ring electrodes located on the same substrate;
[0057] an electron source for emitting electrons;
[0058] A plurality of ring electrodes surround the electron source, and are used to apply positive bias vol...
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The invention discloses an on-chip planar micro ionization vacuum sensor and a manufacturing method. The on-chip planar micro ionization vacuum sensor comprises an electron source and a plurality of annular electrodes which are positioned on the same substrate, the electron source is used for emitting electrons; and the plurality of annular electrodes surround the electron source and are used forapplying positive bias voltage to the electrons, collecting the electrons and determining electron current or applying negative bias voltage to ions, collecting the ions and determining ion current according to input voltage. The size and the mass of the ionization vacuum sensor can be reduced by using the electron source and the plurality of annular electrodes which are positioned on the same substrate; energy consumption and heat production can be reduced by using an on-chip electron source, so that air bleeding is reduced; the measuring range can be selected by selecting two annular electrodes from a plurality of annular electrodes surrounding the outside of the electron source. Due to the fact that large-batch preparation can be achieved in a micro-nano machining mode, the production efficiency can be improved, and the production cost can be reduced.
Description
technical field [0001] The present application relates to the technical field of ionization vacuum sensors, in particular to an on-chip planar miniature ionization vacuum sensor and a manufacturing method. Background technique [0002] At present, vacuum measurement devices are mainly divided into compression vacuum sensors, thin film vacuum sensors, thermocouple vacuum sensors, resistance vacuum sensors and ionization vacuum sensors, etc., and these vacuum sensors have specific measurement ranges. [0003] The ionization vacuum sensor is a vacuum sensor widely used at present. Its basic principle is that electrons with a certain energy ionize the gas molecules in the vacuum into ions, and the ions are collected by the ion collector to detect the ion current Ii. At the same time, the electron current Ie is collected and detected by the electron collector. Within a certain pressure range, the ratio of the ion current Ii to the electron current Ie is proportional to the press...
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IPC IPC(8): G01L21/30
CPCG01L21/30
Inventor 杨威刘文超魏贤龙
Owner 北京大学(天津滨海)新一代信息技术研究院