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Thermistor device and method for manufacturing same

A thermistor element, thermistor technology, applied in resistance manufacturing, thermistor, electrical components, etc., can solve the problems of increasing resistance value and increasing the amount of particles used, so as to suppress the increase in resistance value and achieve low The effect of resistance and cost reduction

Inactive Publication Date: 2020-06-05
MITSUBISHI MATERIALS CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Since it is an intermediate layer with such a high resistance value, there is a problem that the electrode peels off due to thermal cycles caused by long-term use, resulting in a significant increase in the resistance value.
Moreover, since RuO will contain 2 A high-viscosity paste of particles is coated on the surface of the thermistor substrate, so there is also the problem that only a thick intermediate layer can be formed, resulting in RuO containing rare metals. 2 Increased use of pellets

Method used

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  • Thermistor device and method for manufacturing same
  • Thermistor device and method for manufacturing same
  • Thermistor device and method for manufacturing same

Examples

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Embodiment 1

[0057] Regarding the thermistor element 1 manufactured according to the above-mentioned embodiment, the SEM photograph of the cross section is shown in Figure 4 , and SEM photographs showing the cross-sectional state before forming the electrode layer and the surface state of the conductive intermediate layer are shown in Figure 5 and Figure 6 .

[0058] It is clear from these photographs that in RuO 2 A conductive intermediate layer is formed in a state where the particles are in contact with and adhered to each other.

[0059] In addition, in the example of the manufactured thermistor element 1, it is made into a chip shape with a size of 1.0×1.0×0.2 mm, that is, a chip having an overall size of 1.0×1.0 mm and a thickness of 0.2 mm when viewed from above. chip thermistor.

[0060] For this thermistor element 1, use foil-like Au-Sn solder on N 2 Mounted on a gold-metallized AlN substrate in airflow at 325°C. The AlN substrate on which the thermistor element was mount...

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Abstract

Provided are: a thermistor device which can reduce the resistance and thickness of a conductive intermediate layer containing RuO2, and can also suppress an increase in a resistance value caused by the peeling of an electrode; and a method for manufacturing said thermistor device. This thermistor device is provided with: a thermistor element 2 formed of a thermistor material; a conductive intermediate layer 4 formed on the thermistor element; and an electrode layer 5 formed on the conductive intermediate layer, wherein the conductive intermediate layer has an aggregated structure in which RuO2particles are in electrical contact with each other, and SiO2 is present in interstices of the aggregated structure, the conductive intermediate layer having a thickness of 100-1000 nm.

Description

technical field [0001] The present invention relates to a thermistor element with little change in resistance value and high reliability even in a thermal cycle test or the like, and a method for manufacturing the same. Background technique [0002] Generally, a thermistor temperature sensor is used as a temperature sensor for automobile-related technology, information equipment, communication equipment, medical equipment, housing equipment, and the like. The thermistor element used in this thermistor temperature sensor is often used in severe environments in which the temperature repeats and changes greatly. [0003] Furthermore, conventionally, such a thermistor element has employed a thermistor element in which an electrode is formed on a thermistor base using a noble metal paste such as Au. [0004] For example, a thermistor is described in Patent Document 1, wherein the electrode has a double-layer structure of an element electrode on the thermistor substrate and a cov...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01C7/04H01C1/142H01C7/02
CPCH01C1/142H01C7/02H01C7/04H01C1/14H01C7/008H01C17/06573H01C17/281H01C17/30
Inventor 米泽岳洋藤原和崇
Owner MITSUBISHI MATERIALS CORP
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