Method and device for compositely welding glass by double laser beams

Abstract

The invention provides a method and a device for compositely welding glass through double laser beams. The method comprises the following steps: combining ultra-short pulse laser beam and a long pulsewidth laser beam to the same optical axis; and converting the combined composite laser beam into a Bessel beam, and focusing the Bessel beam to the surface of the glass to be welded through a scanning galvanometer, wherein the ultra-short pulse laser beam enables the glass in the area near the focal point to be molten, the molten glass absorbs the energy of the long pulse laser, and the glass materials in other areas are molten by absorbing the energy. According to the method, the focusing range of effective welding in the welding process can be increased by multiple times by utilizing the property of long focal length of the Bessel beam, and firm welding of two transparent brittle materials with large contact gaps is realized.

Description

technical field [0001] The invention relates to the field of laser processing, in particular to a method and device for composite welding glass with double laser beams. Background technique [0002] As a transparent material with excellent corrosion resistance and optical properties, glass has the characteristics of good thermal stability and good chemical stability. It is widely used in optics, semiconductors, electronics, medicine and other fields. In practical applications, two or more Multiple pieces of glass are used for connection. [0003] At present, the traditional connection methods of glass materials are mainly adhesive bonding, direct bonding, thermal brazing, melting bonding, anodic bonding, etc., among which the adhesive is susceptible to aging due to light and high temperature, which reduces the sealing performance and corrosion resistance. The performance is weakened; while direct bonding has too high requirements on the surface quality of the connected part...

AI Technical Summary

Problems solved by technology

It has outstanding advantages such as high processing precision, small heat-affected zone, not easy to break, high connection strength, and space-selective processing, but this method also has the following problems: Although the ultrafast laser can complete instantaneous welding due to its high energy density at the focus , but because a large numerical aperture microscope objective lens is usually used for focusing, the focus space range is small, and the position of the beam remains unchanged. To achieve regional welding, the beam is usually fixed. slow

A complex cleaning process is required, the steps are cumbersome and the efficiency is low

[0005] In addition, the Chinese patent proposes the use of multiple laser beams to weld glass materials. This method improves the efficiency of laser welding, but there are the following problems: when welding beams, the energy of multiple laser beams will be superimposed at the weld, making the material instantaneous If the temperature is too high, excessive thermal stress will cause the material to break. At the same time, the high temperature will cause ablation of the material and affect the welding effect of the material. Therefore, this welding method cannot be applied to a higher energy laser beam; this method is based on Gaussian beam conditions. It can only weld two kinds of the same material with a maximum gap of about 12 μm, so it is impossible to weld glass with a larger gap

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