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Dielectric spectral microscopic measurement using near-field microwaves

A technology of microscopic measurement and microwave dielectric, which is applied in the direction of material analysis, measurement device, and instrument using microwave means, which can solve the problem of difficult to achieve wide-spectrum ellipsometry, and achieve easy large-scale integration, small size, high The effect of spatial resolution

Pending Publication Date: 2020-06-30
李赞
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Imaging ellipsometers for imaging micro-region thin films, difficult to achieve wide-spectrum ellipsometry

Method used

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  • Dielectric spectral microscopic measurement using near-field microwaves
  • Dielectric spectral microscopic measurement using near-field microwaves
  • Dielectric spectral microscopic measurement using near-field microwaves

Examples

Experimental program
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Effect test

Embodiment

[0062] Embodiments The near-field microwave dielectric spectrum microscopic measurement system or method can be used for non-contact microscopic measurement of different types of objects to be measured; and further inversion to determine the polarization characteristics of the target area of ​​the object to be measured.

[0063] Embodiment The near-field microwave dielectric spectrum microscopic measurement system can measure polar liquid without contact. This dielectric spectrum test method has the following advantages: the liquid measured object will not pollute or corrode the probe; there is no air bubble between the probe and the measured liquid, which ensures the stability and reliability of the test; the test speed is fast. Factors such as the chemical composition of polar liquids, ion concentration and temperature can change the dielectric parameter spectrum of the liquid. By directly quantitatively measuring the dielectric parameters of liquids, parameters such as ion ...

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PUM

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Abstract

A system of dielectric spectrum microscopic measurement using near-field microwaves includes a microwave source, an adjustable microwave resonator, a probe, a microwave detection circuit, a position device, and a dielectric spectrum calculation circuit. A method of dielectric spectrum microscopic measurement using near-field microwaves comprises the following steps: enabling the microwave source to generate a microwave signal, and applying the microwave signal to the adjustable microwave resonator; adjusting or fixing the position of the probe away from the target area of a measured object; tuning the adjustable microwave resonator; applying the microwave signal to a target area of the measured object by the probe; detecting a reflected microwave signal; and determining the dielectric spectrum of the target area of the measured object. More complete, direct and accurate information is provided for researching the polarization mechanism of the microwave range of the target area of the measured object. The technical blank of a microwave dielectric spectrum microscopic measurement system is filled. And a temperature control device is added, so that a microwave dielectric temperature spectrum microscopic measurement function can be further provided.

Description

technical field [0001] The invention relates to a dielectric spectrum microscopic measurement technology of a measured object at a microwave frequency, in particular to a dielectric spectrum microscopic measurement system and method based on near-field microwaves, belonging to the field of microwave measurement technology. Background technique [0002] Asami invented the scanning dielectric microscope (SDM) in 1994. In a wide frequency range, SDM uses a three-terminal electrode system to measure inhomogeneous systems: such as biofilm systems, colloidal suspensions, and local permittivity and conductivity of molecular assembly systems such as micelles and vesicles. The SDM operating frequency is lower than 100MHz. Mainly study the interface polarization of low-frequency non-uniform systems. [0003] Microwave refers to the electromagnetic spectrum with frequency from 300MHz to 300GHz and wavelength range from 1m to 1mm. Limited by the Abelian diffraction phenomenon, the sp...

Claims

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Application Information

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IPC IPC(8): G01N22/00
CPCG01N22/00
Inventor 张洮
Owner 李赞
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