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34 results about "Microwave resonators" patented technology

Automatic monitoring data processing method for pipe network pressure

The invention relates to the technical field of pipe network data processing, in particular to an automatic monitoring data processing method for pipe network pressure. The method comprises the following steps: acquiring pipe network structure data; constructing a pipeline topology network based on the pipe network structure data to generate the pipeline topology network; screening main pipelines and branch pipes of the pipeline topology network to obtain pipe network circulation data; carrying out pipe wall microwave resonator deployment on the main pipeline and the branch pipelines based on the pipe network circulation data, and capturing pipeline circumferential deformation harmonic waves in real time through the deployed microwave resonators; longitudinal wave propagation time delay of pipe network circulation data is analyzed, and a pipe body structure dynamic resonance atlas is constructed in combination with pipeline circumferential deformation harmonic waves; and carrying out pipe network internal pressure and pipe wall equivalent stress calculation on the pipeline topology network through a pipe body structure dynamic resonance map. By combining pipeline topology analysis, microwave resonator monitoring, dynamic resonance spectrum and bidirectional fluid-solid coupling analysis, the accuracy of pipe network pressure monitoring and identification is improved.
Owner:JIANGXI YICHUN JING COAL THERMAL POWER CO LTD

magnetic field sensor

The differential detection system (1) includes an optically trapping diamond nitrogen-vacancy doped layer (2) with an adjacent microwave resonator (4) having a resonant frequency with an operating bandwidth around the magnetic resonance of the nitrogen vacancy center. The microwave resonator (4) includes a suppressed portion (4B) and an unsuppressed portion (4A). A sensor photodiode (6A) is positioned distal to the doped layer (2) and aligned with the unsuppressed portion (4A) of the microwave resonator (4). A reference photodiode (6B) is spaced from the sensor photodiode (6A) and is substantially coplanar with the sensor photodiode (6A), while also aligned with the unsuppressed portion (4A) of the microwave resonator (4). The sensor (6A) and reference photodiode (6B) are connected back-to-back to a single transimpedance amplifier.
Owner:THE UNIV OF SYDNEY

Electronic nose device based on microwave resonator array and gas analysis method

The invention discloses an electronic nose device based on a microwave resonator array and a gas analysis method. The device comprises an upper sensing array layer and a lower feed layer located below the upper sensing array layer. The lower feed layer comprises a grounding plane, a lower dielectric substrate arranged on the grounding plane, and a microwave coupling feeder line arranged on the lower dielectric substrate; the upper sensing array layer comprises an upper dielectric substrate and a resonator array arranged on the upper dielectric substrate, the resonator array comprises a plurality of resonator units, and the plurality of resonator units are coated with different gas sensitive material coatings and are used for detecting multi-element gas. According to the device, the characteristic that different gas sensitive materials have different adsorption capacities on different gases is utilized, selective detection and multi-mode combined analysis of the gases are realized, multi-element gas detection can be realized at the same time, the influence of environment temperature and humidity on gas detection precision is effectively resisted, and the device has a wide application prospect in the fields of gas monitoring and sensor device integration.
Owner:JIANGNAN UNIV

Aerosol-generating device

PendingUS20260182648A1Electrical conductorCooling coil
An aerosol-generating device includes a generator configured to generate a microwave, a resonator configured to resonate the microwave and including a conductor that defines a cavity configured to accommodate an aerosol-generating article, and a cooling coil configured to cool the aerosol-generating article, wherein the cooling coil includes an inlet through which air is introduced from an outside, a winding portion including a flow path through which introduced air flows and disposed inside the conductor, and an outlet through which air is discharged from the flow path.
Owner:KT &G CORP

A superconducting quantum capacitance detector with large saturated power

The application discloses a superconducting quantum capacity detector with large saturated power, which comprises a reference ground, a coplanar waveguide transmission line, a superconducting microwave resonator based on a tantalum film and a single Cooper pair box based on aluminum, the superconducting microwave resonator comprises a double helix inductor and an interdigital capacitor, the single Cooper pair box is connected to the interdigital capacitor through aluminum metal wires, the single Cooper pair box and the double helix inductor are located on the same side of the interdigital capacitor, and the single Cooper pair box is located above the double helix inductor, so that the detector unit is more compact, the space utilization is increased, and the number of pixels of a multi-pixel focal plane detector array is increased; the gate capacitor is designed in the shape of a tuning fork, compared with an existing parallel wire structure, double capacitance values can be obtained without increasing the volume of a superconducting island, the smaller the volume of the superconducting island is, the more significant the quantum capacity effect of the detector is, and the more obvious the response is, the larger the gate capacitor is, and the larger the saturated power of the detector is, so that the saturated power can be increased without losing sensitivity.
Owner:NANJING UNIV

Fiber-integrated bi-directional microwave-optical transducer based on rare-earth-ion doped thin films

A microwave-optical transducer device, comprising: an optical cavity formed by a first dielectric substrate having a first optical reflector disposed thereon and a second dielectric substrate having a second optical reflector disposed thereon; a spin ensemble material disposed in the optical cavity, the spin ensemble material disposed on the second dielectric substrate; a planar microwave resonator disposed proximal to the spin ensemble material and inductively coupled thereto; and wherein: the optical cavity is configured to expose the spin ensemble material to an optical-range electromagnetic field; the microwave resonator is configured to expose the spin ensemble material to a micro wave-range electromagnetic field; the spin ensemble material, when exposed to a magnetic field and to an optical pump field having a driving frequency Ωp, to emit the optical-range electromagnetic field upon exposure to the microwave electromagnetic field, and to emit the microwave electromagnetic field upon exposure to the optical-range electromagnetic field.
Owner:UNIVERSITY OF CHICAGO

Microwave resonator array for plasma diagnostics

Embodiments disclosed herein include sensor devices and methods of using the sensor devices. In an embodiment, a sensor device comprises a substrate, a support extending up from the substrate, and a resonator mechanically coupled to the support. In an embodiment, the sensor device further comprises an antenna that is configured to electromagnetically couple with the resonator, wherein the antenna is connected to a transmission line in the substrate.
Owner:APPLIED MATERIALS INC

Tunable one-way and two-way microwave notch filter and design method

The invention discloses a tunable one-way and two-way microwave notch filter and a design method. The filter has one-way and two-way filtering functions. The structure of the device mainly comprises an artificial surface plasmon polariton planar waveguide and a ferrite yttrium iron garnet microwave resonator, a circular polarization spin polarization microwave field with a spin-momentum locking characteristic is generated at a specific position in the planar waveguide, a magneton mode generated in the microwave resonator and the spin polarization microwave field are subjected to spin selective coupling, and under the critical coupling condition, microwaves input in one direction are completely filtered after passing through magneton, and then are subjected to spin polarization. And the microwaves input in the other direction are completely transmitted, so that the unidirectional filtering function of the microwaves at a specific frequency is realized. And an additional microwave resonator is further loaded, and the bidirectional filtering function can be realized by expanding the experimental configuration. The invention does not need complex structural design and strict parameter regulation and control, and provides a simpler, more convenient and more flexible method to realize the multifunctional microwave notch filter.
Owner:ZHEJIANG UNIV

Electro-Optical Component

An electro-optical component comprising an erbium and oxygen implanted silicon waveguide and a superconducting microwave resonator. A blocking layer of opaque material arranged between the waveguide and microwave resonator. The microwave resonator coherently coupled to spin states of the erbium.
Owner:UNIVERSITY OF SALFORD

Integrated microwave temperature control automatic nucleic acid amplification system and its working method

The application relates to the field of nucleic acid amplification technology and provides a full-automatic nucleic acid amplification system integrated with microwave temperature control and a working method thereof.The system comprises a microprocessor, a temperature heating module, a nucleic acid amplification container, a microwave generator connected with the microprocessor and a thermocouple, the microwave generator is connected with the temperature heating module, the temperature heating module adopts a planar microwave resonator or a waveguide, the microwave generator is used for outputting microwave signals with specific frequency and power, the temperature heating module is used for directing the microwave signals to nucleic acid amplification reagents in the nucleic acid amplification container to heat the temperature of the nucleic acid amplification reagents, the thermocouple is used for monitoring the temperature of the nucleic acid amplification reagents and uploading the temperature to the microprocessor, and the microprocessor is used for controlling the frequency and power of the microwave signals according to the temperature of the nucleic acid amplification reagents.The temperature can be rapidly raised, the sample volume is reduced, and the nucleic acid amplification time is shortened.
Owner:SHANDONG UNIV

Method and apparatus for detecting delamination defects in flexible microwave resonators made of ceramic matrix composites

PendingCN122084652AResonant frequency changes significantlyhigh sensitivityFlaw detection using microwavesCoplanar waveguideFrequency offset
This invention discloses a method and apparatus for detecting delamination defects in ceramic matrix composites using a flexible microwave resonator. The apparatus includes a flexible microwave resonator, a vector network analyzer, a two-dimensional scanning platform, and a data processing unit. The flexible microwave resonator consists of a polyimide substrate, a top-opening resonant ring, and a bottom coplanar waveguide feeding structure, conformally attached to the surface to be tested due to its flexibility. The method acquires S11 curves at various points by scanning, extracts the resonant frequency as a feature value, and finds that the resonant frequency offset has a monotonically changing relationship with the depth of the delamination defect. By constructing a resonant frequency distribution image, high-sensitivity localization, imaging, and quantitative depth inversion of delamination defects in ceramic matrix composites are achieved. This invention solves the problems of rigid sensors being unable to adapt to curved surface detection and low sensitivity for small defects, and is suitable for non-destructive testing of complex components such as aero-engine blades.
Owner:TAIHANG NATIONAL LABORATORY +1

Aerosol generation device

The present application relates to an aerosol generating device, comprising a microwave resonator and a receiving seat; the microwave resonator comprises a resonant cavity and an inner conductor unit arranged in the resonant cavity, the inner conductor unit comprises a probe device; the receiving seat comprises a receiving part arranged in the resonant cavity to receive an aerosol generating substrate; the probe device comprises at least two probes arranged at the side of the receiving part and having different lengths. In the present application, the at least two probes of the probe device extend to the periphery of the receiving cavity and have different lengths, which significantly improves the uniformity of the microwave field, facilitates the improvement of the uniformity of the heating of the aerosol generating substrate, significantly enhances the uniformity of the heating of the aerosol generating substrate, and further improves the utilization rate of the aerosol generating substrate.
Owner:SHENZHEN MERIT TECH CO LTD

Split-planar microwave resonator devices for electron spin resonance

In a general aspect, a split-planar microwave resonator device for electron spin resonance is described. In some aspects, a microwave resonator device for electron spin resonance includes parallel first and second substrates that are spaced apart from each other by a separation distance. The microwave resonator device includes a first ground plane disposed on the first substrate; a second ground plane disposed on the second substrate; a first transmission line resonator patterned on the first substrate; and a second transmission line resonator patterned on the second substrate. The first transmission line resonator is configured to produce a first microwave field in a sample region between the first and second substrates; and the second transmission line resonator is configured to produce a second microwave field in the sample region. In some examples, the first and second microwave transmission line resonators are made of superconducting material.
Owner:QUANTUM VALLEY INVESTMENT FUND

Heater assembly and aerosol generating device including the same

A heater assembly includes an oscillator configured to generate microwaves in a specific frequency band, a resonator configured to generate an electric field by resonating the microwaves, and a coupler configured to transmit the generated microwaves to the resonator. The resonator includes a case including an accommodating space accommodating an aerosol generating article and a first opening into which the aerosol generating article is insertable, a plurality of plates spaced apart from each other along a circumferential direction of the aerosol generating article accommodated in the accommodating space, and a connector connecting the plurality of plates and the case and including a second opening corresponding to the first opening, at a location facing the first opening.
Owner:KT&G CO LTD

Microwave resonator and aerosol generating device

The invention provides a microwave resonator and an aerosol generating device. Relates to the technical field of microwave resonance. The fixed barrel is fixedly installed at the bottom of the microwave resonator body, two through holes are formed in the fixed barrel, rotating rods are rotationally installed in the two through holes respectively, the two ends of each rotating rod extend out of the fixed barrel, and semi-protection boxes are fixedly installed on the two rotating rods respectively. And the two rotating rods are fixedly sleeved with worm wheels correspondingly, the two worm wheels are located in the two through openings correspondingly, two L-shaped rubber sealing plates are fixedly installed on the fixed barrel, and the two L-shaped rubber sealing plates make contact with the two semi-protection boxes. The microwave resonator and the aerosol generating device provided by the invention have the advantages of convenience in use, simplicity in operation and dustproof function.
Owner:SHENZHEN COOLSTAR TECH CO LTD

Method for measuring substance quantities in a mixture

A method for measuring substance quantities in a substance mixture including two substances, the method comprises determining a first moisture value for a first of the two substances using a microwave resonator. A second moisture value for the second of the two substances I determined using a microwave resonator. A first measured value and a second measured value are determined for the substance mixture using a microwave resonator. Two scalar factors are determined for two moisture vectors from the first and the second measured values for the substance mixture. The two moisture vectors indicate a direction of a straight line of equal moisture for the first and second substances in a plane of the first and second measured values using the first and second moisture value. A quantity of the first substance and of the second substance in the substance mixture are determined from the two scalar factors.
Owner:TEWS ELEKTRONIK GMBH & CO KG

Automatic monitoring data processing method for pipe network pressure

The present application relates to the technical field of pipe network data processing, and particularly relates to a kind of automatic monitoring data processing methods of pipe network pressure.The method comprises the following steps: obtaining pipe network structure data;Based on pipe network structure data, pipeline topological network construction is carried out, and pipeline topological network is generated;The main pipeline and branch pipe screening are carried out to the pipeline topological network, and pipe network flow data is obtained;Based on pipe network flow data, main pipeline and branch pipe are deployed with pipe wall microwave resonator, and the circumferential deformation harmonic of pipe is captured in real time through microwave resonator after deployment;The longitudinal wave propagation time delay of pipe network flow data is analyzed, and the pipe body structure dynamic resonance spectrum is constructed in combination with the circumferential deformation harmonic;The pipe network internal pressure and pipe wall equivalent stress of pipeline topological network are calculated through pipe body structure dynamic resonance spectrum.The present application improves the accuracy of pipe network pressure monitoring and identification by combining pipeline topological analysis, microwave resonator monitoring, dynamic resonance spectrum and bidirectional fluid-structure coupling analysis.
Owner:JIANGXI YICHUN JING COAL THERMAL POWER CO LTD

Microwave welding equipment for waterproof coiled material

The invention relates to microwave welding equipment for waterproof coiled materials. A containing space is formed in a movable shell; the microwave heating mechanism is integrated in a movable shell to form an independent and movable welding work station, the microwave heating mechanism comprises a microwave generator, a movable assembly and a microwave resonator, microwaves emitted by the microwave generator are output after passing through the microwave resonator, microwave energy directly acts on a welding area, the heat efficiency is high, and the welding efficiency is high. The energy consumption is far lower than that of a continuous hot air blowing mode, no open fire exists, safety and environment friendliness are achieved, microwaves can enable molecules in the coiled material to move violently to generate heat, heat is generated from the interior of the coiled material, and the phenomena that the surface is overheated and coked and the interior is not melted due to traditional external heating are avoided; therefore, the moving assembly with uniform welding depth and high strength is arranged on the moving shell and can drive the microwave generator to move, so that butt joint and separation of the microwave generator and the microwave resonator are realized, and key safety and maintenance convenience are brought.
Owner:HONGRUI INTELLIGENT EQUIP (JIANGSU) CO LTD +1

Quantum processing elements and quantum processing systems

Disclosed is a quantum processing system and a method of operating the quantum processing system. The system includes a first qubit including a first unpaired electron bound to a first donor cluster pair embedded in a semiconductor substrate and a distance from a semiconductor surface, each donor cluster of the first donor cluster pair including at least one donor atom. The system also includes a second qubit including a second unpaired electron bound to a second donor cluster pair embedded in the semiconductor substrate and a distance from the semiconductor surface, each donor cluster of the second donor cluster pair including at least one donor atom. Further, a microwave resonator is positioned between the first qubit and the second qubit, wherein a first end of the microwave resonator is coupled to the first qubit and a second end of the microwave resonator is coupled to the second qubit. Photons of the microwave resonator couple the first qubit and the second qubit.
Owner:SILICON QUANTUM COMPUTING PTY LTD

Aerosol generating device and operation method thereof

An aerosol generating device includes a oscillator configured to generate a microwave, a resonator including an accommodation space accommodating an aerosol generating article, the resonator configured to heat the aerosol generating article by resonating the microwave, a power monitoring unit configured to measure a reflected microwave reflected from the resonator and input to the oscillator, and a processor configured to determine a type of the aerosol generating article based on the reflected microwave measured by the power monitoring unit.
Owner:KT&G CO LTD

Tunable superconducting microwave resonator based on lithium niobate film and tuning method

The invention discloses a tunable superconducting microwave resonator based on a lithium niobate film and a tuning method. The tunable superconducting microwave resonator comprises a coplanar waveguide resonator, a bonding material layer, the lithium niobate film and a metal electrode, the coplanar waveguide resonator comprises a substrate and a thin film material processed on the substrate; the surface of the coplanar waveguide resonator is coated with a bonding material, gaps of the coplanar waveguide resonator are filled with the bonding material to form a bonding material layer, a lithium niobate film is bonded on the bonding material layer, and a metal electrode is processed on the lithium niobate film. The high-speed modulation voltage is applied to the lithium niobate film through the metal electrode, so that the distribution of electrons in the lithium niobate film is instantaneously changed, the relative dielectric constant of the lithium niobate film is changed, the effective dielectric constant of the adjustable superconducting microwave resonator is changed, and tuning is completed.
Owner:THE 41ST INST OF CHINA ELECTRONICS TECH GRP

Magnesium and tungsten ion substituted ZnTiNb2O8 microwave dielectric ceramic material and preparation method thereof

The invention belongs to the technical field of microwave dielectric ceramic materials, and particularly relates to a magnesium and tungsten ion substituted ZnTiNb2O8 microwave dielectric ceramic material and a preparation method thereof, the material uses (Mg0. 5W0. 5) 4 + ions to replace Ti sites in ZnTiNb2O8 crystals, the chemical formula is Zn (Ti1-x (Mg0. 5W0. 5) x) Nb2O8, 0.03 < = x < = 0.15, the dielectric constant of the microwave dielectric ceramic material is 28-34, the quality factor is 29000-39300 GHz, and the temperature coefficient of resonance frequency is-73.5--47.1 ppm / DEG C. The microwave dielectric property of the original ceramic can be improved by replacing Ti site with (Mg0. 5W0. 5) 4 < + > ions, and the microwave dielectric ceramic is suitable for being used as a substrate material for microwave resonators, antennas and related electronic circuits. The temperature coefficient of resonance frequency and the quality factor of the ceramic are improved, the improvement of the temperature coefficient of resonance frequency can ensure the environmental stability of a device, and the high quality factor ensures the low loss and the low heat effect of the device in work.
Owner:XIHUA UNIV

Transformer winding deformation online monitoring system and method based on microwave resonance principle

The invention relates to a transformer winding deformation online monitoring system based on a microwave resonance principle. The system adopts a layered architecture and specifically comprises a monitored entity, a sensor array in an oil tank, an edge computing and communication node and a cloud edge collaborative intelligent platform. The monitored entity is an oil-immersed transformer winding; the sensing array in the oil tank is fixed on the inner wall of the oil tank according to a preset space matrix based on a specifically designed microwave resonator and is used for sensing the displacement of a winding; the edge calculation and communication node integrates a radio frequency measurement unit, a multi-path switching unit, a core processing unit and a communication interface unit, and is responsible for quickly scanning the sensing array and extracting resonance characteristic parameters in real time; and the cloud edge collaborative intelligent platform is deployed in a remote server, integrates a deformation diagnosis model and a three-dimensional visualization engine, and is used for receiving the characteristic parameters and performing quantitative evaluation, positioning and visual early warning of deformation. According to the invention, in-service, real-time and non-contact online monitoring and intelligent diagnosis of the mechanical deformation of the transformer winding are realized.
Owner:国网重庆市电力公司市南供电分公司

Tunable one-way and two-way microwave notch filter and design method

The application discloses a tunable one-way and two-way microwave wave trap filter and a design method, which has one-way and two-way filtering functions. The device structure mainly comprises an artificial surface plasmonic polariton planar waveguide and a yttrium iron garnet microwave resonator. Circular polarization spin polarized microwave fields with spin-momentum locking characteristics are generated at specific positions in the planar waveguide, and the magnon mode generated in the microwave resonator is spin-selectively coupled with the spin polarized microwave field. Under the critical coupling condition, the microwave input in one direction is completely filtered after the magnon, and the microwave input in the other direction is completely transmitted, so that the one-way filtering function of the microwave at a specific frequency is realized. Further loading of additional microwave resonators and through the extension of the experimental configuration, the two-way filtering function can also be realized. The application provides a more simple and flexible method to realize the multifunctional microwave wave trap filter without complex structure design and strict parameter control.
Owner:ZHEJIANG UNIV

Plasma chamber with gas cross-flow, microwave resonators and a rotatable pedestal for multiphase cyclic deposition

A plasma treatment chamber comprises a chamber body having an opening in a top surface thereof. A rotatable pedestal is within the chamber body having a support surface to hold and rotate a workpiece in a processing region. A cross-flow pumping ring is over the opening in the chamber body to inject a gas flow in a direction generally parallel to and across a surface of the workpiece. A lid is over the cross-flow pumping ring, the lid having a plurality of microwave resonators to ignite the gas flow and form plasma.
Owner:APPLIED MATERIALS INC

Microwave resonator and applications thereof

A microwave resonator comprises a metallic structure formed with a cavity defining a symmetry axis, a pair of diamonds positioned at top and bottom ends of the cavity, and a layered dielectric structure between the diamonds. A microwave magnetic field is generated perpendicularly to the symmetry axis of the cavity in response to a static magnetic field and an excitation optical field, both directed parallel to the symmetry axis.
Owner:TECHNION RES & DEV FOUND LTD

Microwave resonator array for magnetic resonance

In a general aspect, a resonator system for electron spin resonance is described. In some aspects, a resonator system includes a first transmission line resonator, a second transmission line resonator, and first and second feedlines. The first transmission line resonator is patterned on a substrate and configured to produce a first microwave field in a first sample region. The second transmission line resonator is patterned on the substrate and configured to produce a second microwave field in a second, distinct sample region. The first and second feedlines are patterned on the substrate. The first and second transmission line resonators are connected in parallel between the first and second feedlines.
Owner:QUANTUM VALLEY INVESTMENT FUND

Lithium ion battery microwave single-sided thickness and conductivity measurement

The invention relates to lithium ion battery microwave single side thickness and conductivity measurement. A sensor system for non-contact single-sided thickness measurement of lithium ion battery electrode coatings includes a high frequency microwave resonator, an intermediate frequency RF resonator, and optionally an optical displacement sensor. High frequency measurements detect the surface impedance and dielectric properties of the sample, which are then used as inputs to calculations involving low frequency coils to determine the thickness of the coating. The optical displacement sensor measures the lift-off (the spacing between the measurement object and the sensor) in real time, and uses the data in interpreting the raw data obtained from the sensor system. The microwave resonator has a concave metal mirror positioned over the electrode. An RF / microwave choke may be included in a microwave resonator to suppress radiant energy loss. The microwave resonator is operable in one or more modes. The microwave resonator and the RF resonator may be coupled to respective readout circuits.
Owner:HONEYWELL INTERNATIONAL INC

Systems and methods for scalable quantum computing

A superconducting circuit includes four superconducting qubits communicatively coupled by a 4-qubit even-parity stabilizer. The 4 -qubit even-parity stabilizer includes a superconducting stabilizer loop, and four inductances, each inductance inductively communicatively coupled to an inductance of a respective one of the four superconducting qubits. The 4-qubit even-parity stabilizer also includes a parity-enforcing super-conducting qubit communicatively coupled to the superconducting loop. A quantum processor comprises four Josephson parametric amplifiers communicatively coupled by a 4-qubit even-parity stabilizer. The Josephson parametric amplifiers comprise pairs of superconducting microwave resonators communicatively coupled by a compound-compound Josephson junction. The 4-qubit even-parity stabilizer includes a superconducting loop, four inductances inductively communicatively coupled to an inductance of a respective one of the four Josephson parametric amplifier, and a parity-enforcing Josephson parametric amplifier communicatively coupled to the superconducting loop.
Owner:D WAVE SYSTEMS INC

Intelligent preparation monitoring method and system for dry film photoresist of glass substrate

The invention provides an intelligent preparation monitoring method and system for a dry film photoresist of a glass substrate, a detection area is constructed in a conveyor belt through a distributed microwave resonator array, when the glass substrate completely enters the detection area, the detection area applies a dielectric gradient field to the glass substrate, and the dry film photoresist is obtained. Obtaining scattering parameters of the dry film photoresist through a multi-band continuous wave scanning mode, inputting the scattering parameters into a dry film photoresist calculation engine, obtaining a dielectric property distribution diagram of the dry film photoresist, constructing a constitutive relation library, converting the dielectric property distribution diagram into dry film photoresist characterization data through the constitutive relation library, and calculating the dry film photoresist characterization data according to the dry film photoresist characterization data. According to the technical scheme, the data of the dry film photoresist are acquired, the process digital twin body is generated, the data are represented through the dry film photoresist, monitoring is carried out in combination with the process digital twin body, and the problems of monitoring lag and insufficient precision in the dry film photoresist preparation process are solved, so that the preparation quality of the dry film photoresist is improved.
Owner:ZHUHAI DYNAMIC TECH OPTICAL IND