Smooth modification liquid of heterojunction solar cell silicon wafer, and preparation method and smooth modification method thereof
A solar cell and heterojunction technology, which is applied in the field of solar cells, can solve problems such as uneven thickness of amorphous silicon, affecting battery performance, and inability to completely cover pyramidal amorphous silicon films, so as to reduce surface roughness, improve performance, cost reduction effect
Inactive Publication Date: 2020-07-17
熵熠(上海)能源科技有限公司
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Problems solved by technology
The possible reason is that the thickness of amorphous silicon deposited on the top and bottom of the pyramid is not uniform, resulting in thick top and thin bottom, and it is even possible that the amorphous silicon film cannot be completely covered at the bottom of the pyramid. It is the position where defects are easily generated in the intrinsic silicon thin film layer, which will inevitably affect the performance of the battery
Method used
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Embodiment 1
[0023] Soak a 200 μm thick monocrystalline silicon wafer in 7wt% KOH solution at 80°C for 160s, then take it out, put it in 85°C texturing solution (5.6wt% KOH+0.4wt% texturing additive), soak for 1500s After taking out and washing; Obtain the heterojunction solar cell silicon wafer A1 (such as figure 1 shown in a).
[0024] Mix electrolytic ozone water with a concentration of 15mg / L and hydrofluoric acid with a concentration of 48wt% at a volume ratio of 100:1 to form a smooth modification liquid;
[0025] Soak the heterojunction solar cell silicon wafer A1 with a pyramid textured surface in a smoothing solution at 15°C for 500s, then take it out, wash it and dry it to obtain the heterojunction solar cell silicon wafer B1 (such as figure 1 shown in b).
[0026] Performance Testing:
[0027] The silicon wafer A1 and the silicon wafer B1 are subjected to a scanning electron microscope test. Under the scanning electron microscope, it was found that the pyramid structure of t...
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The invention discloses a smooth modification liquid and a smooth modification method for a heterojunction solar cell silicon wafer. Wherein the smooth modification liquid is composed of ozone, hydrogen fluoride and water. According to the smoothing method, the heterojunction solar cell silicon wafer with the pyramid suede is placed in smoothing modification liquid to be soaked. The ozone concentration of the smooth modification liquid is low, the final product is oxygen, and the smooth modification liquid is environmentally friendly, does not cause potential harm to operators, and can effectively reduce the cost of chemicals. The smooth modification liquid and the smooth modification method are adopted to soak the heterojunction solar cell silicon wafer with the pyramid suede; due to thecooperative use of ozone and hydrofluoric acid in the smooth modification liquid, the sharp tower tip and the sharp tower bottom of the pyramid suede can be rounded, the surface roughness of the pyramid suede is reduced, the subsequent intrinsic silicon film deposition is more uniform, and the performance of the heterojunction solar cell is improved.
Description
technical field [0001] The invention relates to the field of solar cells, in particular to a smoothing modification liquid for silicon chips of heterojunction solar cells, a preparation method thereof, and a smoothing modification method. Background technique [0002] The manufacturing process of amorphous silicon / crystalline silicon heterojunction solar cells is simple, including only four main steps of cleaning texture, depositing amorphous silicon film, depositing transparent conductive oxide film and screen printing electrodes. Heterojunction solar cells not only have the high efficiency and high stability of crystalline silicon solar cells, but also have higher output at high temperatures because of the relatively simple process, low energy consumption of low-temperature processes, and better product temperature characteristics. Therefore, heterojunction solar cells have attracted much attention in recent years. [0003] At present, in the manufacturing process of mono...
Claims
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IPC IPC(8): H01L31/0236H01L31/072H01L31/18
CPCH01L31/02363H01L31/072H01L31/1804Y02E10/547Y02P70/50
Inventor 刘超李正平杨杰任栋樑陈昌明徐小娜
Owner 熵熠(上海)能源科技有限公司